JPWO2019235566A1 - Fixtures, optics, and methods of manufacturing optics - Google Patents

Abstract

A fixing instrument for fixing an optical component to a fixing base, a holding component for fixing the optical component, a first member for fixing the holding component, a third member fixed to the fixing base, and a first member. It is provided with a second member for connecting and fixing the third member, and a bolt for fastening the holding component to the first member, the first member to the second member, and the second member to the third member. .. Further, a first virtual plane in which the holding component and the first member face each other, a second virtual plane in which the first member and the second member face each other, and a second member in which the second member and the third member face each other. 3 Virtual planes are not on the same plane.

Description

The present disclosure relates to a fixture for fixing an optical component, an optical device, and a method for manufacturing the optical device.

Optical components used in optical devices such as telescopes need to be fixed in position and angle with high precision. In addition, some are used in various environments such as outer space and extremely low temperature (see Non-Patent Document 1). As a fixing device for fixing an optical component to an optical device with high accuracy, for example, Patent Document 1 describes a six-DOF fixing device. Further, Patent Document 2 describes that an optical component is positioned by using a position adjusting instrument and then adhesively fixed by using an adhesive.

VINROUGE: a very compact 2-5 μm high-resolution spectrograph with Germanium diffraction grating (Takayuki. Arasaki etc.)

Japanese Unexamined Patent Publication No. 2004-354616 Japanese Unexamined Patent Publication No. 5-107433

The fixing device according to the embodiment of the present disclosure is a fixing device for fixing an optical component to a fixing base, and is a holding component to which the optical component is fixed, a first member to which the holding component is fixed, and the fixing. The third member fixed to the table, the second member that connects and fixes the first member and the third member, the holding component is the first member, and the first member is the second member. The second member is provided with a bolt for fastening the second member to the third member, respectively. Further, a first virtual plane in which the holding component and the first member face each other, a second virtual plane in which the first member and the second member face each other, and the second member and the third member. Are not on the same plane as the third virtual planes that face each other.

The fixing device according to the embodiment of the present disclosure is a fixing device for fixing an optical component to a fixing base, and includes a holding component to which the optical component is fixed, a first member to which the holding component is fixed, and the above. A fourth member that connects and fixes the fixing base and the first member, the holding component is attached to the first member, the first member is attached to the fourth member, and the fourth member is attached to the fixing base. It is equipped with bolts to be fastened. Further, a first virtual plane in which the holding component and the first member face each other, a second virtual plane in which the first member and the fourth member face each other, the fourth member and the fixing base, and the like. Are not on the same plane as the fourth virtual planes that face each other.

The optical device according to the embodiment of the present disclosure includes the fixing device.

Further, the method for manufacturing an optical device according to an embodiment of the present disclosure includes a step of mounting an optical component on a stage that can move in three different directions and positioning the optical component, and three different surfaces of the positioned optical component. It includes a step of fixing the stage to the fixing base with a fixing device whose position and angle can be adjusted inside, and a step of removing the stage from the optical component.

It is a top view which shows the schematic example of the optical apparatus of this embodiment. (A) is a perspective view, and (b) is a sectional view taken along the line AA'in (a) which shows an example of the fixing device of this embodiment. It is a perspective view which shows the optical apparatus of this embodiment, and the stage for positioning an optical component.

The optical device of the present disclosure will be described with reference to the drawings, taking an optical device for an astronomical telescope as an example. FIG. 1 is a plan view showing a schematic example of the optical device of the present embodiment.

The optical device 10 includes a slit 20 that limits and passes an electromagnetic wave W from the outside, a primary mirror 40 and a secondary mirror 50 that reflect the electromagnetic wave W, and a camera 60 that is an imaging means. The electromagnetic wave W that has passed through the slit 20 is reflected in the order of the primary mirror 40, the secondary mirror 50, and the primary mirror 40, and is guided to the camera 60. Various lenses or mirrors may be arranged between the primary mirror 40 and the camera 60. Each of these optical components is fixed to a fixing base 5 and housed in a low temperature holding mechanism (not shown) provided with a window portion to suppress temperature fluctuations. The electromagnetic wave W incident on the optical device 10 from the outside travels along the optical path, is imaged by the camera 60, and can analyze the information of the observation object.

FIG. 2 shows an example of the fixing device of the present embodiment, (a) is a perspective view, and (b) is a cross-sectional view taken along the line AA'of (a). As shown in FIG. 2, the fixing device 1 includes a holding component 3 to which the optical component 60 (61) such as a camera, a lens, and a mirror is fixed, a first member 1a to which the holding component 3 is fixed, and a fixing base 5. The third member 1c fixed to the lens, the second member 1b connecting and fixing the first member 1a and the third member 1c, the holding component 3, the first member 1a, the second member 1b, and the third member 1c. The optical component 61 is fixed to the fixing base 5 with a plurality of bolts for fastening the fixing base 5 to the fixing base 5. That is, the holding component 3 is fixed to the first member 1a, and is not fixed to the other second member 1b, the third member 1c, and the fixing base 5. Further, the first member 1a is fixed to the second member 1b, and is not fixed to the third member 1c and the fixing base 5. Further, the second member 1b is fixed to the third member 1c, and is not fixed to the fixing base 5.

The size of the upper surface of the fixing base 5 is, for example, 330 mm to 600 mm in the X direction and 150 mm to 600 mm in the y direction.

The fixing device 1 includes a first virtual plane 2a in which the holding component 3 and the first member 1a face each other, a second virtual plane 2b in which the first member 1a and the second member 1b face each other, and a second member 1b. The third virtual plane 2c in which the third member 1c and the third member 1c face each other are not on the same plane. By making the fixture 1 have such a configuration, the position and angle of the optical component 60 (61) can be accurately determined within the three planes of the first virtual plane 2a, the second virtual plane 2b, and the third virtual plane 2c. Can be adjusted to. That is, the optical component 60 (61) arranged with three-dimensional degrees of freedom can be fixed to the fixing base 5 by absorbing the directions of a total of 6 axes including the three directions and the in-plane angles. The fact that the first virtual plane 2a, the second virtual plane 2b, and the third virtual plane 2c are not on the same plane means that the first virtual plane 2a and the second virtual plane 2b intersect instead of being parallel. It means that the second virtual plane 2b and the third virtual plane 2c are not parallel but intersect, and the first virtual plane 2a and the third virtual plane 2c are not parallel but intersect. ..

With the above configuration, the fixing device 1 can fix the optical component 60 (61) with high accuracy, and can be used in various environments such as outer space and extremely low temperature. In the conventional 6-DOF fixing device shown in Patent Document 1, there is a risk that the position and angle may shift when fixing the optical component, and the accuracy may deteriorate. However, in the fixing device 1 of the present disclosure, the optical component 60 (61) ) Can be fixed with high accuracy. Further, in the 6-DOF fixing device shown in Patent Document 1, after fixing the optical component, the device may loosen and the position and angle of the optical component may change. However, in the fixing device 1 of the present disclosure, the optical component is used. Even after fixing the 60 (61), it is possible to reduce changes in the position and angle of the optical component 60 (61). Further, in the fixing device in which the optical component is fixed by using an adhesive as shown in Patent Document 2, there is a concern about the reliability of the adhesive, and the performance tends to deteriorate in an environment such as outer space or extremely low temperature. The fixing device 1 of the present disclosure is unlikely to deteriorate in performance even in an environment such as outer space or extremely low temperature.

Further, as another embodiment of the fixed component, in FIG. 2, the second member 1b and the third member 1c may be regarded as one fourth member. In this case, the first virtual plane 2a in which the holding component 3 and the first member 1a face each other, the second virtual plane 2b in which the first member 1a and the fourth member face each other, the fourth member and the fixing base 5 Are not on the same plane as the fourth virtual plane 2d that faces each other. By making the fixture 1 have such a configuration, the position and angle of the optical component 60 (61) can be accurately determined within the three planes of the first virtual plane 2a, the second virtual plane 2b, and the fourth virtual plane 2d. Can be adjusted to. That is, the optical component 60 (61) arranged with three-dimensional degrees of freedom can be fixed to the fixing base 5 by absorbing the directions of a total of 6 axes including the three directions and the in-plane angles. The fact that the first virtual plane 2a, the second virtual plane 2b, and the fourth virtual plane 2d are not in the same plane means that the first virtual plane 2a and the second virtual plane 2b intersect rather than be parallel to each other. It means that the second virtual plane 2b and the fourth virtual plane 2d are not parallel but intersect, and the first virtual plane 2a and the fourth virtual plane 2d are not parallel but intersect. ..

The holding component 3, the first member 1a, the second member 1b, and the third member 1c have through holes through which bolts are passed. For example, with the first virtual plane 2a as the boundary surface, the first member 1a has a through hole, the holding component 3 has a screw hole, the second virtual plane 2b has a boundary surface, the second member 1b has a through hole, and the first member 1a has a through hole. With the screw hole and the third virtual plane 2c as the boundary surface, a through hole is formed in the second member 1b, a screw hole is formed in the third member 1c, a through hole 1e is formed in the third member 1c, and a screw hole 1f is formed in the fixing base 5. , Fasten with bolts respectively.

Note that FIG. 2B shows a case where the third member 1c is fastened to the fixing base 5 with bolts 1d, but the same applies to the case where other members are fastened to each other.

At this time, the outer diameter of the bolt is made 0.1 mm to 10 mm, particularly preferably 0.5 mm to 1 mm smaller than the inner diameter of the through hole. With such a setting, when each component constituting the fixing device 1 is fastened with bolts, each of the first virtual plane 2a, the second virtual plane 2b, the third virtual plane 2c, and the fourth virtual plane 2d is used. In the plane, the position of the optical component 60 (61) can be adjusted within the range of 0.1 mm to 10 mm or 0.5 mm to 1 mm. The screw hole 1f is, for example, an internal space formed by the coil insert, and when the coil insert is used, the bolt is fastened to the coil insert with a washer in between.

Further, it is preferable that the facing surfaces of the holding component 3, the first member 1a, the second member 1b and the third member 1c facing each other have an open porosity of 0.5 area% or less.

When the open porosity is within the above range, the possibility that floating fine particles invade the open pores is low, so that highly accurate positioning is facilitated.

Further, the average diameter of the open pores on the facing surface is preferably 3 μm or less, and the maximum diameter is preferably 10 μm or less.

When the average diameter and the maximum diameter of the open pores are in the above ranges, the possibility that large floating fine particles invade the open pores is reduced, so that more accurate positioning becomes easier.

In order to obtain the open porosity, the average diameter of the open pores, and the maximum diameter, the diamond abrasive grains having an average particle diameter D50 of 3 μm are polished on a copper plate in the depth direction from the surface of the member to be observed. Then, it is polished on a tin plate using diamond abrasive grains having an average particle size D50 of 0.5 μm. The polished surface obtained by these polishings is used as an observation surface.

Then, using an optical microscope, the observation surface is photographed at four locations with a magnification of 100 times and a measurement target range of, for example, a horizontal length of 720 μm and a vertical length of 540 μm. Next, in the captured image, the area excluding the peripheral part (area: 226856 μm ² ) is set as the measurement range, and image analysis software (for example, Win ROOF manufactured by Mitani Shoji Co., Ltd.) is used to measure each of the four locations. By analyzing the range, the diameter equivalent to the circle of the pores can be obtained.

The threshold value of the equivalent circle diameter of the open pores may be 0.868 μm.

Further, the holding component 3, the first member 1a, the second member 1b, and the third member 1c may have, for example, a rectangular parallelepiped shape.

At least one of the holding component 3, the first member 1a, the second member 1b, and the third member 1c has an average linear expansion coefficient of ± 1.5 × 10 ^-6 / K from the operating temperature (for example, 10 K or less) to room temperature. It consists of the following ceramics or glass. Examples of such ceramics include ceramics containing cordierite, lithium aluminosilicate, potassium zirconium phosphate or mullite as a main component.

Cordierite as a main component ceramics, Ca is less 0.6 wt% to 0.4 wt% in terms of CaO, Al is Al ₂ O ₃ 3.5 wt% 2.3 wt% or more in terms of less and Mn And Cr may be contained in an amount of 0.6% by mass or more and 0.7% by mass or less in terms of _{MnCr 2} O _4. This ceramic can have an average coefficient of linear expansion of ± 20 × 10 ^-9 / K or less.

Ceramics containing lithium aluminosilicate as a main component may contain 20% by mass or less of silicon carbide.

Further, as an example of glass, glass containing titanium silicic acid as a main component can be mentioned. If a member made of ceramics or glass having a small average coefficient of linear expansion is used, the change in shape is small even when exposed to a large temperature change, so that the member has high reliability.

Here, when at least one of the holding component 3, the first member 1a, the second member 1b, and the third member 1c is made of ceramics, the average linear expansion coefficient of the members made of ceramics is in accordance with JIS R 1618: 2002. Just ask.

When at least one of the holding component 3, the first member 1a, the second member 1b, and the third member 1c is made of glass, the average coefficient of linear expansion of the member made of glass can be obtained in accordance with JIS R 3251: 1995. Good.

When the average coefficient of linear expansion of each member is ± 1 × 10 ^-6 / K or less, the measurement may be performed using an optical heterodyne method 1 optical path interferometer.

The principal component in ceramics refers to a component that accounts for 60% by mass or more of the total 100% by mass of the components constituting the ceramic of interest. In particular, the main component is preferably a component that accounts for 95% by mass or more of the total 100% by mass of the components constituting the ceramic of interest. The components constituting the ceramics may be obtained by using an X-ray diffractometer (XRD). The content of each component can be determined by determining the content of the elements constituting the component using a fluorescent X-ray analyzer (XRF) or an ICP emission spectroscopic analyzer after identifying the component and converting it into the identified component. Good. The same applies to glass.

The bolt may consist of at least one of an iron-cobalt alloy, an iron-cobalt-carbon alloy, an iron-nickel alloy or an iron-nickel-cobalt alloy.

This is because such an alloy has an average coefficient of linear expansion close to that of ceramics.

In particular, the bolt may be made of a low thermal expansion metal such as iron-36 wt% nickel alloy (trademark is Invar (registered trademark, Imphy Alloys)). The coil insert and washer used for fastening with the bolt may be, for example, stainless steel such as SUS304, SUS304L, SUS304N1, SUS304N2, SUS316, SUS317, SUS312L, SUS329J1 or SUS329J4L. This is because these stainless steels have high corrosion resistance.

With the above configuration, the optical component 60 (61) can be accurately fixed to the fixing base 5 by using the fixing instrument 1, for example, with an accuracy of 1 μm or less.

In particular, the average linear expansion coefficient from the operating temperature (for example, 10 K or less) to room temperature is ± 1.5 × 10 ^-6 / K or less for all the holding parts 3, the first member 1a, the second member 1b, and the third member 1c. It may consist of ceramics or glass.

The optical device of the present disclosure includes a fixing device 1, and the optical device 10 shown in FIG. 3 includes an optical component 60, a fixing device 1, and a fixing base 5 that supports the fixing device 1. The size of is about 600 mm × 600 mm × 600 mm. In the present embodiment, the fixing device 1 is housed in the low temperature holding mechanism together with the optical component 60. Therefore, the fixing device 1 is preferably made of the above-mentioned low thermal expansion material.

FIG. 3 is a perspective view showing the optical device of this embodiment and a stage for positioning optical components.

The manufacturing method of the optical device 10 of the present disclosure will be described with reference to FIG. The manufacturing method of the optical device 10 of the present disclosure is different from the step of attaching the optical component 60 (61) to the stage 6 movable in three different directions and positioning the optical component 60 (61). It includes a step of fixing to the fixing base 5 with a fixing device 1 whose position and angle can be adjusted in one plane, and a step of removing the stage 6 from the optical component 60 (61).

As the fixing device 1, the fixing device 1 of the present disclosure is suitable.

Hereinafter, the details of the manufacturing method of the optical device 10 of the present disclosure will be described by taking the fixing device 1 shown in FIG. 1 as an example. The optical component 60 (61) such as a camera is on the optical path of the electromagnetic wave W reflected by the primary mirror 40 and the secondary mirror 50, and its position and angle need to be fixed accurately. Specifically, three-dimensionally, the position is required to be at the submicron level, and the angle is required to be arranged within a few seconds.

First, the primary mirror 40 and the secondary mirror 50 are fixed at predetermined positions on the fixing base 5.

Next, the holding component 3 is attached to the stage 6 which can move in three different directions. Here, the holding component 3 is, for example, a camera stand. The three different directions are the X direction, the Y direction, and the Z direction shown in FIG. 3, and are three directions orthogonal to each other. The stage 6 is, for example, a high-precision XYZ stage that enables the holding component 3 to move in three orthogonal directions. As the stage 6, an XY-axis stage 6a (for example, TSD-602SLWP manufactured by SIGMA KOKI Co., Ltd.) and a Z-axis stage 6b (TSD-603RLWP manufactured by SIGMA KOKI Co., Ltd.) can be used in combination. The holding component 3 is attached to the stage 6 in a state in which adjustment can be performed in a direction substantially parallel to the optical axis of the electromagnetic wave W and in two directions perpendicular to the direction.

Next, the stage 6 is used to position the holding component 3. Positioning is performed, for example, by attaching a mirror (collation mirror) 61 to the holding component 3 before attaching the camera 60, using a He-Ne laser, and passing the light incident on the primary mirror 40 and the mirror (collation mirror) 61. Then, the interference with the light reflected from the primary mirror 40 may be measured with an optical interferometer, and the holding component 3 may be set to a desired position and angle. For example, the angle formed by both reflected waves when a parallel electromagnetic wave W is incident is adjusted to be within 2 seconds. If the heights of the optical axes of the interferometer and the optical device 10 do not match, rotate the direction of the optical device 10 as appropriate to measure the interference between the light incident on the primary mirror 40 and the light reflected from the primary mirror 40. You may.

Next, the third member 1c and the fixing base 5 are bolted 1d.

Next, the first member 1a is temporarily fixed to the holding component 3 in a state where the position and angle can be adjusted in the first virtual plane 2a with bolts. Similarly, the second member 1b and the third member 1c, and the first member 1a and the second member 1b are temporarily fixed in the second virtual plane 2b and the third virtual plane 2c in a state where the positions and angles can be adjusted, respectively. The order of temporary fixing of the first member 1a, the second member 1b, and the third member 1c is not particularly limited.

Next, the first member 1a and the holding part 3, the second member 1b and the third member 1c, the first member 1a and the second member 1b are finally tightened with bolts, and the holding part 3 is tightened to the first member 1a and the second member. The member 1b and the third member 1c are sequentially fixed to the fixing base 5. Again, the order of final tightening of the first member 1a, the second member 1b, and the third member 1c is not particularly limited.

By temporarily fixing the holding component 3 before the final tightening, the posture of the holding component 3 can be finely adjusted. In addition, the stress applied when the fixing device 1 is fastened can be reduced, and damage to the fixing device 1 can be suppressed.

Then, the stage 6 is removed from the holding component 3, the mirror (verification mirror) 61 is removed, and the camera 60 is attached. The stage 6 is removed because the stage 6 is made of a material having a high coefficient of linear expansion, for example, steel.

Although the embodiments of the present disclosure have been described above, the present disclosure is not limited to the above-described embodiments, and various changes, improvements, combinations, and the like can be made without departing from the gist of the present disclosure.

1 Fixing device 1a 1st member 1b 2nd member 1c 3rd member 1d Bolt 1e Through hole 1f Screw hole 2a 1st virtual plane 2b 2nd virtual plane 2c 3rd virtual plane 2d 4th virtual plane 3 Holding part 5 Fixing base 6 Stage 10 Optical device 20 Slit 40 Primary mirror 50 Secondary mirror 60 Optical parts (camera)
61 Optical parts (mirror (collation mirror))

Claims (11)

A fixture that fixes optical components to a fixing base.
The holding component to which the optical component is fixed and the holding component
The first member to which the holding part is fixed and
The third member fixed to the fixing base and
A second member that connects and fixes the first member and the third member,
The holding component is provided with the first member, the first member is provided with the second member, and the second member is provided with a bolt for fastening the second member to the third member.
A first virtual plane in which the holding component and the first member face each other,
A second virtual plane in which the first member and the second member face each other,
A fixing device in which the second member and the third virtual plane on which the third member faces each other are not on the same plane. At least one of the holding component, the first member, the second member, and the third member is made ^{of ceramics or glass having an average linear expansion rate of ± 1.5 × 10 -6} / K or less, and the bolt is The fixing device according to claim 1, further comprising at least one of an iron-cobalt alloy, an iron-cobalt-carbon alloy, an iron-nickel alloy and an iron-nickel-cobalt alloy. The holding component, the first member, the second member, and the third member facing each other have an open porosity of 0.5 area% or less (excluding 0 area%). Or the fixing device according to 2. The holding component, the first member, the second member, and the third member have through holes through which the bolts pass, and the outer diameter of the bolts is 0.1 mm to 10 mm larger than the inner diameter of the through holes. The small fixture according to any one of claims 1-3. A fixture that fixes optical components to a fixing base.
The holding component to which the optical component is fixed and the holding component
The first member to which the holding part is fixed and
A fourth member that connects and fixes the fixing base and the first member,
The holding component is provided with the first member, the first member is provided with the fourth member, and the fourth member is provided with a bolt for fastening the fourth member to the fixing base.
A first virtual plane in which the holding component and the first member face each other,
A second virtual plane in which the first member and the fourth member face each other,
A fixing device in which the fourth member and the fourth virtual plane on which the fixing base faces each other are not on the same plane. At least one of the holding component, the first member, and the fourth member is made ^{of ceramics or glass having an average coefficient of linear expansion of ± 1.5 × 10 -6} / K or less, and the bolt is an iron-cobalt type. The fixing device according to claim 5, which comprises at least one of an alloy, an iron-cobalt-carbon alloy, an iron-nickel alloy and an iron-nickel-cobalt alloy. The fifth or sixth aspect of the present invention, wherein the holding component, the first member, and the fourth member facing each other have an open porosity of 0.5 area% or less (excluding 0 area%). Fixing device. 5. The holding component, the first member, and the fourth member have through holes through which the bolts pass, and the outer diameter of the bolts is 0.1 mm to 10 mm smaller than the inner diameter of the through holes. The fixing device according to any one of 7 to 7. An optical device comprising the fixture according to any one of claims 1-8. The process of mounting and positioning the optical components on a stage that can move in three different directions,
A process of fixing the positioned optical component to a fixing base with a fixing device whose position and angle can be adjusted in three different planes.
It comprises a step of removing the stage from the optical component.
Manufacturing method of optical equipment. The process of mounting and positioning the optical components on a stage that can move in three different directions,
The step of fixing the positioned optical component to the fixing base with the fixing device according to any one of claims 1 to 8.
It comprises a step of removing the stage from the optical component.
Manufacturing method of optical equipment.

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