JPWO2019160818A5 - - Google Patents
Download PDFInfo
- Publication number
- JPWO2019160818A5 JPWO2019160818A5 JP2020564802A JP2020564802A JPWO2019160818A5 JP WO2019160818 A5 JPWO2019160818 A5 JP WO2019160818A5 JP 2020564802 A JP2020564802 A JP 2020564802A JP 2020564802 A JP2020564802 A JP 2020564802A JP WO2019160818 A5 JPWO2019160818 A5 JP WO2019160818A5
- Authority
- JP
- Japan
- Prior art keywords
- load lock
- lock chamber
- housing member
- sealed housing
- chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Claims (22)
ロードロックチャンバを備えるハウジングであって、前記ロードロックチャンバが長手方向に対向した第１の端部と第２の端部ならびに貫通チャネルを有する、ハウジングと、
前記第２の端部に結合されたドアと、
前記第１の端部に結合されたシール組立体カートリッジであって、前記ロードロックチャンバの前記ハウジングに取り付けられた密封ハウジング部材を備えるシール組立体カートリッジと
を備え、前記密封ハウジング部材が、前記ロードロックチャンバの前記第１の端部に、前記貫通チャネルの一部分を形成するポートを備え、前記シール組立体カートリッジが、第１の公称位置を有し、それによって、前記ハウジングに対して左右および／または上下に浮動することができ、また、前記第１の公称位置からオフセットされ得る第２の操作位置を有し、それによって、ＸＹステージの真空密封接触面とのセルフセンタリング整列が可能になる、ロードロック組立体。 A load lock assembly for sample analysis systems
A housing comprising a load lock chamber, wherein the load lock chamber has a first end and a second end facing longitudinally as well as a through channel.
With the door coupled to the second end,
A seal assembly cartridge coupled to the first end, comprising a seal assembly cartridge comprising a sealed housing member attached to the housing of the load lock chamber , wherein the sealed housing member is said. The first end of the load lock chamber comprises a port forming a portion of the through channel, the sealed assembly cartridge having a first nominal position, thereby left and right and to the housing. / Or has a second operating position that can float up and down and can be offset from the first nominal position, which allows self-centering alignment with the vacuum sealed contact surface of the XY stage. , Road lock assembly.
（ｉｉ）前記ロードロックチャンバの前記チャネルは、横幅が高さを上回り、１ｃｃ～１００ｃｃの容積を有する、および／または
（ｉｉｉ）前記ロードロックチャンバと連通して、前記ロードロックチャンバに大気への通気口をつけることおよび／または真空を与えることができる、少なくとも１つの弁をさらに備える、および／または
（ｉｖ）前記ドアが、前記ロードロックチャンバの前記第２の端部に対して枢動可能に取り付けられており、前記ロードロックチャンバの前記第２の端部に対して密封可能に閉じることができ、任意で、前記ドアを自動的に開閉するように前記ドアに取り付けられた第２の歯車と係合する第１の歯車に結合されたシャフトを有するモータをさらに備え、かつ任意で、前記第２の歯車が前記ドアに取り付けられたアームに結合されており、前記第２の歯車が３つの側面のみを有し、前記３つの側面のうちの１つは外周に歯車の歯があり、６０～１２０度の角度範囲を有する、請求項１から５のいずれか一項に記載のロードロック組立体。 (I) The housing of the load lock chamber comprises a flange surrounding the recess at the first end of the load lock chamber, and the sealed housing member resides in the recess and / or.
(Ii) The channel of the load lock chamber is wider than height and has a volume of 1 cc to 100 cc and / or.
(Iii) Further comprising at least one valve capable of communicating with the load lock chamber to provide a vent to the atmosphere and / or provide a vacuum to the load lock chamber, and / or.
(Iv) The door is pivotally attached to the second end of the load lock chamber and can be hermetically closed to the second end of the load lock chamber. And optionally, further comprising a motor having a shaft coupled to a first gear that engages a second gear attached to the door to automatically open and close the door, and optionally said. A second gear is coupled to an arm attached to the door, the second gear has only three sides, one of the three sides has gear teeth on the outer circumference. The load lock assembly according to any one of claims 1 to 5, which has an angle range of 60 to 120 degrees .
（ｉｉ）前記密封ハウジング部材には、８～１２の前記間隔を置いた開口があり、前記密封ハウジング部材が、停留部材の開口と整列して間隔を置いた複数の開口をさらに備え、これらを通って固定部材が延在し、停留プレートを通って延在する前記固定部材が、外部の対向するヘッドを有し、前記ロードロックチャンバの前記壁に取り付けられた前記固定部材よりも短い、請求項２に記載のロードロック組立体。 (I) Combined with an XY stage having a slide holder with a surface of a sealed contact surface, the slide holder is inserted into the seal assembly cartridge when the seal assembly cartridge is in the first nominal position. When engaged with the sealing contact surface of the slide holder, the seal assembly cartridge is pushed to the second operating position and optionally the sealing contact of the slide holder before the fixing member is tightened. The surface of the surface is oblong in the lateral dimension and has a perimeter with laterally spaced opposed arched ends and an outer surface that tapers toward the recesses of the slide holder. And / or
(Ii) The sealed housing member has 8 to 12 spaced openings, wherein the sealed housing member further comprises a plurality of spaced openings aligned with the openings of the retaining member. Claims that the fixation member extends through and extends through the retention plate has an external facing head and is shorter than the fixation member mounted on the wall of the load lock chamber. Item 2. The load lock assembly according to item 2.
前記第２のＯリングおよび前記密封ハウジング部材の前記第２の端部に結合された停留部材であって、前記密封ハウジング部材の前記第２の端部における開口と整列する開口を備える停留部材と、
前記密封ハウジング部材の前記第１の端部における開口を通って延在する複数のロードロックチャンバ固定部材と、
前記停留部材の前記開口を通って前記密封ハウジング部材の前記第２の端部へと延在する複数の停留部材固定部材と
をさらに備え、
前記停留部材固定部材は前記ロードロックチャンバ固定部材よりも短い、請求項１から７のいずれか一項に記載のロードロック組立体。 First and second laterally oblong O-rings held at the first and second ends facing each other at longitudinal intervals of the sealed housing member, to the door of the load lock chamber. With the first and second O-rings, the first O-ring held at the first end facing is larger than the second O-ring held at the second end.
A retaining member coupled to the second end of the second O-ring and the sealed housing member and comprising an opening aligned with the opening at the second end of the sealed housing member. ,
A plurality of load lock chamber fixing members extending through an opening at the first end of the sealed housing member.
Further comprising a plurality of anchoring member fixing members extending through the opening of the anchoring member to the second end of the sealed housing member.
The load lock assembly according to any one of claims 1 to 7 , wherein the retaining member fixing member is shorter than the load lock chamber fixing member.
開口を有する第１の壁を伴う真空チャンバと、
前記真空チャンバの中のＸＹステージと、
ロードロックチャンバを伴うハウジングを備えるロードロックチャンバ組立体であって、前記ロードロックチャンバが、対向した第１の端部と第２の端部を有して長手方向に延在する貫通チャネルを備え、前記真空チャンバの前記第１の壁の内側にあるかまたは隣接する前記第１の端部で前記真空チャンバの前記第１の壁に取り付けられている、ロードロックチャンバ組立体とを備え、
前記ロードロックチャンバ組立体が、
前記ロードロックチャンバの前記第２の端部に対して密封可能かつ解放可能に結合されたドアと、
前記ロードロックチャンバの前記第１の端部の一部分を形成するポートを備えるシール組立体カートリッジであって、第１の公称位置を有することにより、前記ロードロックチャンバ組立体の前記ハウジングに対して左右および上下に浮動することができ、前記ＸＹステージの真空密封接触面との係合に応答して前記第１の公称位置からオフセットされ得る第２の操作位置を有することにより、前記ＸＹステージの密封接触面とのセルフセンタリング整列をもたらすシール組立体カートリッジと
をさらに備える、質量分析システム。 It ’s a mass spectrometry system.
A vacuum chamber with a first wall with an opening,
The XY stage in the vacuum chamber and
A load lock chamber assembly comprising a housing with a load lock chamber, wherein the load lock chamber has a longitudinally extending through channel having a first and a second end facing each other. With a load lock chamber assembly attached to the first wall of the vacuum chamber at the first end of the vacuum chamber inside or adjacent to the first wall of the vacuum chamber .
The load lock chamber assembly
A door that is hermetically and releasably coupled to said second end of the load lock chamber,
A sealed assembly cartridge with a port forming a portion of the first end of the load lock chamber, which has a first nominal position to be left and right with respect to the housing of the load lock chamber assembly. And by having a second operating position that can float up and down and can be offset from the first nominal position in response to engagement with the vacuum sealed contact surface of the XY stage . A mass spectrometric system further equipped with a seal assembly cartridge that provides self-centering alignment with the contact surface.
前記ロードロックチャンバの前記ハウジングに結合された密封ハウジング部材であって、前記ポートのまわりに延在するチャネルを伴う前記真空チャンバに面する表面を備える密封ハウジング部材と、
前記密封ハウジング部材の前記チャネルにおいて、前記密封ハウジング部材の前記チャネルの外部にある距離だけ突出するように保持されたＯリングと、
前記Ｏリングを間に挟んで前記密封ハウジング部材に結合された停留部材と
を備え、
前記ＸＹステージが、摺動自在に前記Ｏリングと係合して前記ロードロックチャンバの前記第１の端部を密封する密封接触面を伴うスライド保持具を備え、
任意で、前記密封ハウジング部材の周囲のまわりの位置に、間隔を置いて８～１２の開口があり、固定部材がこれらの開口を通って延在し、前記浮動を可能にするように、緩んだ状態で前記ロードロックチャンバの内壁セグメントに取り付けられ得、前記固定部材が締められて、前記シール組立体カートリッジを前記ロードロックチャンバの前記ハウジングに対して前記第２の操作位置にしっかりと取り付ける、および／または
（ｉｉ）前記ロードロックチャンバの前記ハウジングが備えるフランジが、前記貫通チャネルを通って接近できる壁セグメントを伴う凹部を囲み、間隔を置いた貫通開口を備え、前記フランジが前記真空チャンバの前記第１の壁に取り付けられており、前記凹部には前記シール組立体カートリッジの密封ハウジング部材が存し、固定部材が、前記壁セグメントの前記貫通開口を通って前記密封ハウジング部材の開口の中へ延在し、前記ＸＹステージの密封接触面は横長であり、横方向に間隔を置いて対向したアーチ形の端部を伴う周囲と、前記スライド保持具の凹部に向かう方向に角度が下がる外表面とを有し、前記ロードロックチャンバの前記貫通チャネルが、横方向次元において横長であり、横方向に対向したアーチ形の端部を伴う、および／または
（ｉｉｉ）前記シール組立体カートリッジが、前記ロードロックチャンバの内部の壁の貫通開口と整列する間隔を置いた複数の開口を伴う密封ハウジング部材を備え、固定部材が、前記壁を通って前記密封ハウジング部材の前記開口の中へ長手方向に延在して、前記ロードロックチャンバの前記ハウジングに前記シール組立体カートリッジを取り付け、前記固定部材が緩んでいるとき、前記シール組立体カートリッジが前記第１の公称位置にあり、前記固定部材が締められたとき、前記シール組立体カートリッジが前記第２の操作位置にある、請求項９に記載のシステム。 (I) The seal assembly cartridge
A sealed housing member coupled to the housing of the load lock chamber, comprising a surface facing the vacuum chamber with a channel extending around the port.
An O-ring held in the channel of the sealed housing member so as to project a distance outside the channel of the sealed housing member.
A retaining member coupled to the sealed housing member with the O-ring in between is provided.
The XY stage comprises a slide holder with a sealing contact surface that slidably engages with the O-ring to seal the first end of the load lock chamber .
Optionally, there are 8-12 openings at intervals around the perimeter of the sealed housing member, and the anchoring member extends through these openings and is loose to allow the float. Can be attached to the inner wall segment of the load lock chamber in the state, the fixing member is tightened and the seal assembly cartridge is firmly attached to the housing of the load lock chamber in the second operating position. And / or
(Ii) A flange of the housing of the load lock chamber surrounds a recess with a wall segment accessible through the through channel, with spaced through openings, wherein the flange is the first of the vacuum chamber. In the recess, there is a sealed housing member of the sealed assembly cartridge, the anchoring member extending through the through opening of the wall segment into the opening of the sealed housing member. However, the sealed contact surface of the XY stage is horizontally long, and the perimeter with the arch-shaped ends facing each other at lateral intervals and the outer surface whose angle decreases in the direction toward the recess of the slide holder. The through channel of the load lock chamber is laterally elongated in the lateral dimension, with laterally opposed arched ends, and / or.
(Iii) The seal assembly cartridge comprises a sealed housing member with a plurality of spaced openings aligned with through openings in the inner wall of the load lock chamber, with a fixing member passing through the wall to seal the seal. The seal assembly cartridge is attached to the housing of the load lock chamber in a longitudinal direction extending into the opening of the housing member, and when the fixing member is loose, the seal assembly cartridge is the first. 9. The system of claim 9 , wherein the seal assembly cartridge is in the second operating position when the fixing member is tightened in a nominal position .
対向した第１の端部と第２の端部を伴うロードロックチャンバを有する質量分析計を設けることであって、前記第１の端部が、収集真空チャンバの中に、または隣接して存在し、前記第２の端部が、前記第１の端部から間隔を置いて存在し、ドアを有する、質量分析計を設けることと、
前記ドアが前記ロードロックチャンバの前記第２の端部に対して密封可能に閉じている間に、ＸＹステージのスライド保持具を前記収集真空チャンバから前記ロードロックチャンバに挿入することと、
前記スライド保持具の密封接触面が前記ロードロックチャンバの前記第１の端部の密封接触面と係合したとき、前記ロードロックチャンバの前記第１の端部を前記収集真空チャンバから自動的に密封することと、
前記ロードロックチャンバに大気への通気口をつけることと、
前記ドアを開くことと、
前記ロードロックチャンバの前記第２の端部からスライドを挿入して、前記ロードロックチャンバ内の前記スライド保持具と係合させることと、
前記ドアを閉じて前記ロードロックチャンバを密封することと、
前記ロードロックチャンバを真空圧まで真空引きすることと、
前記ドアが閉じられて前記ロードロックチャンバが減圧下の状態で、前記スライド保持具を前記スライドとともに前記真空チャンバの中へ引っ込ませることと
を含む、分析用の試料を扱う方法。 It is a method of handling samples for analysis.
A mass spectrometer having a load-lock chamber with a first and second end facing each other, wherein the first end is present in or adjacent to the collection vacuum chamber. And to provide a mass spectrometer in which the second end is spaced from the first end and has a door.
Inserting the slide retainer of the XY stage from the collection vacuum chamber into the load lock chamber while the door is hermetically closed to the second end of the load lock chamber.
When the sealed contact surface of the slide holder engages with the sealed contact surface of the first end of the load lock chamber, the first end of the load lock chamber is automatically disengaged from the collection vacuum chamber. To seal and
To provide a vent to the atmosphere in the load lock chamber,
Opening the door
Inserting a slide from the second end of the load lock chamber to engage with the slide holder in the load lock chamber.
Closing the door to seal the load lock chamber,
Evacuating the load lock chamber to vacuum pressure and
A method of handling a sample for analysis comprising retracting the slide holder with the slide into the vacuum chamber with the door closed and the load lock chamber under reduced pressure.
（ｉｉ）セットアップ中または設置中に、
前記収集真空チャンバから、ＸＹステージの前記スライド保持具を前記ロードロックチャンバの中に挿入することと、
前記挿入に応答して、シール組立体カートリッジを、公称位置から、左右および／または上下に、セルフセンタリングされる第２の位置まで移動させて、前記スライド保持具の前記密封接触面と整列させることと、
次いで、前記シール組立体カートリッジを、前記ロードロックチャンバの前記ハウジング上の固定位置にしっかりと取り付けて、前記ＸＹステージと整列した操作位置を与えることとをさらに含む、および／または
（ｉｉｉ）前記通気口をつけることおよび／または前記真空引きに応答して、前記ロードロックチャンバの前記第１の端部上の曲げ材を曲げることをさらに含み、前記曲げ材が、前記ロードロックチャンバの前記第１の端部上の剛体の密封ハウジング部材の上や下に延在する外周を備え、前記曲げ材が前記チャンバと整列する開口を備える、請求項１１に記載の方法。 (I) Further comprising analyzing the sample on or on the slide, the sample being analyzed to identify one or more microorganisms in the mass range of about 2000 to about 20,000 Dalton. And / or
(Ii) During setup or installation
Inserting the slide holder of the XY stage into the load lock chamber from the collection vacuum chamber
In response to the insertion, the seal assembly cartridge is moved from the nominal position left and right and / or up and down to a second self-centered position to align with the sealed contact surface of the slide holder. When,
The seal assembly cartridge is then firmly attached to a fixed position on the housing of the load lock chamber to provide an operating position aligned with the XY stage and / or.
(Iii) Further comprising bending the bender on the first end of the loadlock chamber in response to the venting and / or the evacuation, wherein the bender is the loadlock. 11. The method of claim 11 , comprising an outer circumference extending above or below a rigid sealed housing member on the first end of the chamber, with an opening in which the bend material aligns with the chamber .
長手方向に対向した第１の端部と第２の端部および貫通チャネルを有するロードロックチャンバと、
前記第２の端部に結合されたドアと、
前記第１の端部に結合されたシール組立体と
を備え、
前記シール組立体が、
前記ロードロックチャンバのハウジングに結合された剛体の密封ハウジング部材であって、前記ロードロックチャンバの前記第１の端部に前記貫通チャネルの一部分を形成するポートを備える剛体の密封ハウジング部材と、
前記ロードロックチャンバの前記ハウジングおよび前記剛体の密封ハウジング部材に結合された曲げ材であって、前記剛体の密封ハウジング部材の上や下に延在する外周、および前記剛体の密封ハウジング部材の前記ポートと整列する開口を備える曲げ材と
を備え、
任意で、前記曲げ材が薄板を備え、前記曲げ材の前記外周が、前記ロードロックチャンバの前記ハウジングのフランジの開口と整列する間隔を置いた複数の開口を備える、試料分析システム用のロードロック組立体。 A load lock assembly for sample analysis systems
A load lock chamber with longitudinally opposed first and second ends and through channels,
With the door coupled to the second end,
With a seal assembly coupled to the first end,
The seal assembly
A rigid sealed housing member coupled to the housing of the load lock chamber, the rigid sealed housing member comprising a port forming a portion of the through channel at the first end of the load lock chamber.
Bending material coupled to the housing of the load lock chamber and the sealed housing member of the rigid body, the outer circumference extending above and below the sealed housing member of the rigid body, and the port of the sealed housing member of the rigid body. With a bending material with an opening to align with ,
Optionally, the load lock for a sample analysis system, wherein the bend material comprises a thin plate and the outer circumference of the bend material has a plurality of openings spaced so as to align with the openings of the flange of the housing of the load lock chamber. Assembly.
（ｉｉ）前記ロードロックチャンバの前記貫通チャネルは、横幅が高さを上回り、１ｃｃ～１００ｃｃの容積を有する、および／または
（ｉｉｉ）前記ロードロックチャンバと連通して、前記ロードロックチャンバに大気への通気口をつけることおよび／または真空を与えることができる、少なくとも１つの弁をさらに備える、および／または
（ｉｖ）前記ドアが、前記ロードロックチャンバの前記第２の端部に対して枢動可能に取り付けられており、前記ロードロックチャンバの前記第２の端部に対して密封可能に閉じることができ、任意で、前記ドアを自動的に開閉するように前記ドアに取り付けられた第２の歯車と係合する第１の歯車に結合されたシャフトを有するモータをさらに備え、かつ任意で、前記第２の歯車が前記ドアに取り付けられたアームに結合されており、前記第２の歯車が３つの側面のみを有し、前記３つの側面のうちの１つは外周に歯車の歯があり、６０～１２０度の角度範囲を有する、請求項１３から１６のいずれか一項に記載のロードロック組立体。 (I) The housing of the load lock chamber is provided with a flange surrounding the recess at the first end of the load lock chamber, the bender is attached to the flange, and the rigid body is fitted in the recess. Sealed housing members are present and / or
(Ii) The penetration channel of the load lock chamber is wider than height and has a volume of 1 cc to 100 cc and / or.
(Iii) Further comprising at least one valve capable of communicating with the load lock chamber to provide a vent to the atmosphere and / or provide a vacuum to the load lock chamber, and / or.
(Iv) The door is pivotally attached to the second end of the load lock chamber and can be hermetically closed to the second end of the load lock chamber. And optionally, further comprising a motor having a shaft coupled to a first gear that engages a second gear attached to the door to automatically open and close the door, and optionally said. A second gear is coupled to an arm attached to the door, the second gear has only three sides, one of the three sides has gear teeth on the outer circumference. The load lock assembly according to any one of claims 13 to 16 , which has an angle range of 60 to 120 degrees .
開口を有する第１の壁を伴う真空チャンバと、
前記真空チャンバの中のＸＹステージと、
対向した第１の端部と第２の端部を有して長手方向に延在する貫通チャネルを伴うロードロックチャンバを備えるロードロックチャンバ組立体と
を備え、前記ロードロックチャンバが、前記真空チャンバの前記第１の壁の内側にあるかまたは隣接する前記第１の端部で前記真空チャンバの前記第１の壁に取り付けられており、前記ロードロックチャンバ組立体が、
前記ロードロックチャンバの前記第２の端部に結合されたドアと、
前記ロードロックチャンバの前記第１の端部の一部分を形成するポートを備える剛体の密封ハウジング部材と、
前記ロードロックチャンバのハウジングおよび前記剛体の密封ハウジング部材に結合された曲げ材であって、前記剛体の密封ハウジング部材の上や下に延在する外周、および前記剛体の密封ハウジング部材の前記ポートと整列する開口を備える曲げ材と
を備える、質量分析システム。 It ’s a mass spectrometry system.
A vacuum chamber with a first wall with an opening,
The XY stage in the vacuum chamber and
It comprises a load lock chamber assembly comprising a load lock chamber having a first end and a second end facing each other and having a longitudinally extending through channel , wherein the load lock chamber is the vacuum. The load lock chamber assembly is attached to the first wall of the vacuum chamber at the first end of the first wall inside or adjacent to the first wall of the chamber.
With the door coupled to the second end of the load lock chamber,
A rigid sealed housing member with a port forming a portion of the first end of the load lock chamber.
Bending material coupled to the housing of the load lock chamber and the sealed housing member of the rigid body, the outer circumference extending above and below the sealed housing member of the rigid body, and the port of the sealed housing member of the rigid body. A mass spectrometric system with a bending material with aligned openings.
前記密封接触面が、横長であって、横方向に間隔を置いて対向したアーチ形の端部を伴う周囲と、前記スライド保持具の凹部に向かう方向に角度が下がる外表面とを有する、および／または
（ｉｉ）前記曲げ材が薄いステンレス鋼板を備え、前記外周が、前記ロードロックチャンバの前記ハウジングのフランジの開口と整列する間隔を置いた複数の開口を備え、任意選択でピンである固定部材が、整列した前記開口を通って延在して前記真空チャンバの前記第１の壁に取り付けられる、および／または
（ｉｉｉ）前記貫通チャネルが横方向次元において横長であり、横方向に対向したアーチ形の端部を伴う、請求項２０に記載のシステム。 (I) The rigid sealed housing member comprises an outward facing surface with a channel extending around the port, and the rigid sealed housing member in the channel pushes an O-ring out of the channel. A slide holder with a sealed contact surface that is projected and held by a distance and the XY stage slidably engages with the O-ring to seal the first end of the load lock chamber. , Optional
The sealed contact surface is oblong and has a perimeter with laterally opposed arched ends and an outer surface that is angled down toward the recess of the slide holder. /or
(Ii) A fixing member in which the bend material comprises a thin stainless steel plate, the outer periphery comprises a plurality of openings spaced apart from the openings of the flange of the housing of the load lock chamber, and optionally a pin. , Extending through the aligned openings and attached to the first wall of the vacuum chamber, and / or
(Iii) The system of claim 20 , wherein the penetration channel is laterally elongated in the lateral dimension, with laterally opposed arched ends .
収集真空チャンバから、前記ＸＹステージのスライド保持具を前記ロードロックチャンバの中に挿入することと、
前記挿入に応答して、シール組立体カートリッジを、公称位置から、左右および／または上下に、セルフセンタリングされる第２の位置まで移動させて、前記スライド保持具の密封接触面と整列させることと、
次いで、前記シール組立体カートリッジを、前記ロードロックチャンバのハウジング上の固定位置にしっかりと取り付けて、前記ＸＹステージと整列した操作位置を与えることと
を含む、整列させる方法。 A method of aligning the XY stage with the load lock chamber of the sample analyzer, during setup or installation.
Inserting the slide holder of the XY stage into the load lock chamber from the collection vacuum chamber,
In response to the insertion, the seal assembly cartridge is moved from the nominal position left and right and / or up and down to a second self-centered position to align with the sealed contact surface of the slide holder. When,
A method of aligning the seal assembly cartridge, comprising firmly attaching the seal assembly cartridge to a fixed position on the housing of the load lock chamber to provide an operating position aligned with the XY stage.
Applications Claiming Priority (3)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| US201862629746P | 2018-02-13 | 2018-02-13 | |
| US62/629,746 | 2018-02-13 | ||
| PCT/US2019/017507 WO2019160818A1 (en) | 2018-02-13 | 2019-02-11 | Load lock chamber assemblies for sample analysis systems and related mass spectrometer systems and methods |
Publications (3)
| Publication Number | Publication Date |
|---|---|
| JP2021513732A JP2021513732A (en) | 2021-05-27 |
| JPWO2019160818A5 true JPWO2019160818A5 (en) | 2022-02-22 |
| JP7317864B2 JP7317864B2 (en) | 2023-07-31 |
Family
ID=67541093
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP2020564802A Active JP7317864B2 (en) | 2018-02-13 | 2019-02-11 | Loadlock chamber assembly for sample analysis system and associated mass spectrometer system and method |
Country Status (8)
| Country | Link |
|---|---|
| US (2) | US10872754B2 (en) |
| EP (1) | EP3753040A4 (en) |
| JP (1) | JP7317864B2 (en) |
| KR (1) | KR20200118847A (en) |
| CN (1) | CN112005337A (en) |
| AU (2) | AU2019220557B2 (en) |
| CA (1) | CA3090698A1 (en) |
| WO (1) | WO2019160818A1 (en) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2024024194A1 (en) * | 2022-07-29 | 2024-02-01 | 株式会社島津製作所 | Sample plate holder for mass spectrometry device |
Family Cites Families (33)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4699555A (en) * | 1986-05-08 | 1987-10-13 | Micrion Limited Partnership | Module positioning apparatus |
| US5498545A (en) | 1994-07-21 | 1996-03-12 | Vestal; Marvin L. | Mass spectrometer system and method for matrix-assisted laser desorption measurements |
| USRE39353E1 (en) * | 1994-07-21 | 2006-10-17 | Applera Corporation | Mass spectrometer system and method for matrix-assisted laser desorption measurements |
| US5625184A (en) | 1995-05-19 | 1997-04-29 | Perseptive Biosystems, Inc. | Time-of-flight mass spectrometry analysis of biomolecules |
| US6002127A (en) | 1995-05-19 | 1999-12-14 | Perseptive Biosystems, Inc. | Time-of-flight mass spectrometry analysis of biomolecules |
| DE19638577C1 (en) | 1996-09-20 | 1998-01-15 | Bruker Franzen Analytik Gmbh | Simultaneous focussing of all masses in time of flight mass spectrometer |
| US6090176A (en) | 1997-03-18 | 2000-07-18 | Kabushiki Kaisha Toshiba | Sample transferring method and sample transfer supporting apparatus |
| US6356337B1 (en) | 2000-03-08 | 2002-03-12 | Anvik Corporation | Two-sided substrate imaging using single-approach projection optics |
| US7427750B2 (en) * | 2003-01-17 | 2008-09-23 | Griffin Analytical Technologies, L.L.C. | Mass spectrometer assemblies, mass spectrometry vacuum chamber lid assemblies, and mass spectrometer operational methods |
| US7601300B2 (en) | 2003-10-28 | 2009-10-13 | BIOMéRIEUX, INC. | Compact, integrated system for processing test samples |
| US7500822B2 (en) * | 2004-04-09 | 2009-03-10 | Edwards Vacuum, Inc. | Combined vacuum pump load-lock assembly |
| US20060050376A1 (en) | 2004-09-02 | 2006-03-09 | Houston Edward S | Robotic microscopy apparatus for high throughput observation of multicellular organisms |
| US7622079B2 (en) | 2005-03-22 | 2009-11-24 | Applied Biosystems, Llc | Dual nest microplate spotter |
| US7405396B2 (en) | 2005-05-13 | 2008-07-29 | Applera Corporation | Sample handling mechanisms and methods for mass spectrometry |
| US7679053B2 (en) * | 2006-09-25 | 2010-03-16 | Mds Analytical Technologies, A Business Unit Of Mds Inc. | Multiple sample sources for use with mass spectrometers, and apparatus, devices, and methods therefor |
| US7564028B2 (en) | 2007-05-01 | 2009-07-21 | Virgin Instruments Corporation | Vacuum housing system for MALDI-TOF mass spectrometry |
| WO2012112537A2 (en) | 2011-02-14 | 2012-08-23 | Massachusetts Institute Of Technology | Methods, apparatus, and system for mass spectrometry |
| DE102011110250B4 (en) | 2011-05-13 | 2019-05-16 | Leica Biosystems Nussloch Gmbh | Gripping device for transporting racks |
| JP6173879B2 (en) * | 2013-10-28 | 2017-08-02 | 日本電子株式会社 | Charged particle beam apparatus and sample container |
| US20150198681A1 (en) | 2014-01-15 | 2015-07-16 | Prudhvi Raju Chintalapati | Method for transporting an NMR sample spaced horizontally and vertically from a cryo-magnetic system using a vibration isolated motorized curvilinear Transport Carrier with dual end-effector and method for telescoping the Carrier to different cryo-magnetic systems at different heights |
| WO2015158384A1 (en) * | 2014-04-16 | 2015-10-22 | Applied Materials, Inc. | Load lock chamber for a vacuum processing system and vacuum processing system |
| FR3024465B1 (en) * | 2014-07-30 | 2018-03-23 | Biomerieux | CHARACTERIZATION OF MICROORGANISMS BY MALDI-TOF |
| AU2015308821B2 (en) | 2014-08-29 | 2021-01-28 | Biomerieux, Inc. | MALDI-TOF mass spectrometers with delay time variations and related methods |
| US9214323B1 (en) * | 2014-09-02 | 2015-12-15 | Virgin Instruments Corporation | Method and apparatus for transporting sample plates between chambers of a mass spectrometer |
| US9443707B2 (en) | 2015-02-01 | 2016-09-13 | Virgin Instruments Corporation | Method and apparatus for transporting samples in a mass spectrometer |
| US9362095B1 (en) * | 2015-02-01 | 2016-06-07 | Virgin Instruments Corporation | Method and apparatus for transporting samples in a mass spectrometer |
| CN105957789B (en) * | 2015-03-09 | 2020-05-12 | Ib实验室有限公司 | Method, apparatus, system and software for processing a sample by ion milling |
| WO2016184487A1 (en) * | 2015-05-15 | 2016-11-24 | Applied Materials, Inc. | Load lock chamber, vacuum processing system with load lock chamber and method for evacuating a load lock chamber |
| EP3419045B1 (en) * | 2015-11-20 | 2020-08-19 | Shimadzu Corporation | Vacuum processing apparatus and mass spectrometer |
| JP6512304B2 (en) * | 2015-11-20 | 2019-05-15 | 株式会社島津製作所 | Vacuum processing apparatus and mass spectrometer |
| US10450144B2 (en) | 2016-05-27 | 2019-10-22 | Biomerieux, Inc. | System and method for transferring specimen containers between detection instruments |
| WO2018057888A1 (en) | 2016-09-23 | 2018-03-29 | Driver, Inc. | Integrated systems and methods for automated processing and analysis of biological samples, clinical information processing and clinical trial matching |
| US10665444B2 (en) * | 2018-02-13 | 2020-05-26 | BIOMéRIEUX, INC. | Sample handling systems, mass spectrometers and related methods |
-
2019
- 2019-02-11 AU AU2019220557A patent/AU2019220557B2/en active Active
- 2019-02-11 WO PCT/US2019/017507 patent/WO2019160818A1/en active Application Filing
- 2019-02-11 US US16/271,999 patent/US10872754B2/en active Active
- 2019-02-11 CA CA3090698A patent/CA3090698A1/en active Pending
- 2019-02-11 CN CN201980023917.4A patent/CN112005337A/en active Pending
- 2019-02-11 KR KR1020207025933A patent/KR20200118847A/en active Search and Examination
- 2019-02-11 JP JP2020564802A patent/JP7317864B2/en active Active
- 2019-02-11 EP EP19754594.0A patent/EP3753040A4/en active Pending
-
2020
- 2020-11-18 US US16/950,992 patent/US11244819B2/en active Active
-
2023
- 2023-11-29 AU AU2023274134A patent/AU2023274134A1/en active Pending
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US8087309B2 (en) | Hermetic sample holder and method for performing microanalysis under controlled atmosphere environment | |
| CN201262602Y (en) | Apparatus for sampling mass spectrometer gas | |
| US7581916B2 (en) | Sample introduction and transfer system and method | |
| US20160225596A1 (en) | Method And Apparatus For Transporting Samples In A Mass Spectrometer | |
| WO2014013709A1 (en) | Specimen holder tip part, specimen holder having said specimen holder tip part, gonio stage, and electron microscope having said gonio stage | |
| US4889319A (en) | Bakeable vacuum systems | |
| JP5081986B2 (en) | Shutter and gate valve assembly for vacuum systems | |
| US10802003B2 (en) | Method and system for decoupling a capillary column from a gas chromatography-mass spectrometry (GC-MS) system | |
| JPWO2019160818A5 (en) | ||
| CN112345572A (en) | Sample transfer device and transfer method | |
| EP0128716B1 (en) | Inlet system for a mass spectrometer | |
| US8604445B2 (en) | Method of evacuating sample holder, pumping system, and electron microscope | |
| CN108045959B (en) | Sample transmission interconnection device between chambers with different vacuum degrees | |
| EP3027989B1 (en) | Sample transfer to high vacuum transition flow | |
| CN213658349U (en) | Automatic sampling device of dangerous chemicals | |
| JPH11201920A (en) | Sample observing and analyzing method by vacuum system observing and analyzing device, and sample box for same device | |
| CN214956747U (en) | Pulse type ion sampling device and mass spectrometer | |
| JP4079997B2 (en) | Arrangement for connecting low-pressure inputs of gas analyzers | |
| JP2021513732A (en) | Loadlock chamber assembly for sample analysis systems and related mass spectrometer systems and methods | |
| CN115155681B (en) | Membraneless Shock Tube and Sampling System | |
| CN113314391A (en) | Pulse type ion sampling device and mass spectrometer | |
| CN213658350U (en) | High-viscosity automatic sampling valve | |
| CN220208894U (en) | Sensitivity enhancing device of time-of-flight mass spectrometer | |
| CN212400055U (en) | Sealing device of rubber ring and vacuumizing tire mold | |
| CN113639933B (en) | Air leakage detection method |