JPWO2008126624A1 - 非鉛系磁性光学素子とその製造方法 - Google Patents
非鉛系磁性光学素子とその製造方法 Download PDFInfo
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- 230000005291 magnetic effect Effects 0.000 title claims abstract description 129
- 230000003287 optical effect Effects 0.000 title claims abstract description 71
- 238000004519 manufacturing process Methods 0.000 title claims description 16
- GWEVSGVZZGPLCZ-UHFFFAOYSA-N Titan oxide Chemical compound O=[Ti]=O GWEVSGVZZGPLCZ-UHFFFAOYSA-N 0.000 claims abstract description 209
- 239000002135 nanosheet Substances 0.000 claims abstract description 107
- 239000010936 titanium Substances 0.000 claims abstract description 53
- 238000006467 substitution reaction Methods 0.000 claims abstract description 41
- 239000010409 thin film Substances 0.000 claims abstract description 27
- OGIDPMRJRNCKJF-UHFFFAOYSA-N titanium oxide Inorganic materials [Ti]=O OGIDPMRJRNCKJF-UHFFFAOYSA-N 0.000 claims abstract description 13
- RTAQQCXQSZGOHL-UHFFFAOYSA-N Titanium Chemical compound [Ti] RTAQQCXQSZGOHL-UHFFFAOYSA-N 0.000 claims abstract description 10
- 229910052719 titanium Inorganic materials 0.000 claims abstract description 10
- 239000002356 single layer Substances 0.000 claims abstract description 8
- 229910052742 iron Inorganic materials 0.000 claims description 44
- 239000000758 substrate Substances 0.000 claims description 20
- 229910052748 manganese Inorganic materials 0.000 claims description 18
- 239000000203 mixture Substances 0.000 claims description 12
- 229910052751 metal Inorganic materials 0.000 claims description 9
- 239000000126 substance Substances 0.000 claims description 9
- 239000002184 metal Substances 0.000 claims description 8
- 229910052804 chromium Inorganic materials 0.000 claims description 7
- 229910052802 copper Inorganic materials 0.000 claims description 7
- 229910052759 nickel Inorganic materials 0.000 claims description 7
- 229910052720 vanadium Inorganic materials 0.000 claims description 7
- 229920000620 organic polymer Polymers 0.000 claims description 5
- 150000002484 inorganic compounds Chemical class 0.000 claims description 4
- 229910010272 inorganic material Inorganic materials 0.000 claims description 4
- 229920000592 inorganic polymer Polymers 0.000 claims description 4
- 150000002500 ions Chemical class 0.000 claims description 4
- 150000004696 coordination complex Chemical class 0.000 claims description 3
- 238000003618 dip coating Methods 0.000 claims description 3
- 239000000696 magnetic material Substances 0.000 claims description 3
- 238000004528 spin coating Methods 0.000 claims description 3
- 125000002091 cationic group Chemical group 0.000 claims description 2
- 238000010030 laminating Methods 0.000 claims 1
- 230000000694 effects Effects 0.000 abstract description 24
- 230000005389 magnetism Effects 0.000 abstract 1
- XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 description 90
- 239000010408 film Substances 0.000 description 52
- 239000000463 material Substances 0.000 description 21
- 238000000034 method Methods 0.000 description 19
- 238000004891 communication Methods 0.000 description 14
- 229920000371 poly(diallyldimethylammonium chloride) polymer Polymers 0.000 description 14
- 239000004065 semiconductor Substances 0.000 description 14
- 230000003993 interaction Effects 0.000 description 13
- 239000010410 layer Substances 0.000 description 12
- 230000004044 response Effects 0.000 description 10
- 238000010586 diagram Methods 0.000 description 9
- 238000005516 engineering process Methods 0.000 description 9
- 230000008569 process Effects 0.000 description 9
- 230000007704 transition Effects 0.000 description 9
- 238000001228 spectrum Methods 0.000 description 8
- 239000013078 crystal Substances 0.000 description 7
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 6
- 230000005294 ferromagnetic effect Effects 0.000 description 6
- 238000003475 lamination Methods 0.000 description 6
- 239000002086 nanomaterial Substances 0.000 description 6
- 238000010521 absorption reaction Methods 0.000 description 5
- 238000004364 calculation method Methods 0.000 description 5
- 238000011161 development Methods 0.000 description 5
- 230000007613 environmental effect Effects 0.000 description 5
- 239000002223 garnet Substances 0.000 description 5
- 230000010287 polarization Effects 0.000 description 5
- 229910020598 Co Fe Inorganic materials 0.000 description 4
- 229910002519 Co-Fe Inorganic materials 0.000 description 4
- 238000000862 absorption spectrum Methods 0.000 description 4
- 230000015572 biosynthetic process Effects 0.000 description 4
- 230000005274 electronic transitions Effects 0.000 description 4
- 230000001747 exhibiting effect Effects 0.000 description 4
- 230000004927 fusion Effects 0.000 description 3
- 239000012535 impurity Substances 0.000 description 3
- 229910000464 lead oxide Inorganic materials 0.000 description 3
- 238000005259 measurement Methods 0.000 description 3
- 238000005442 molecular electronic Methods 0.000 description 3
- 239000000382 optic material Substances 0.000 description 3
- YEXPOXQUZXUXJW-UHFFFAOYSA-N oxolead Chemical compound [Pb]=O YEXPOXQUZXUXJW-UHFFFAOYSA-N 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000001179 sorption measurement Methods 0.000 description 3
- 229910052723 transition metal Inorganic materials 0.000 description 3
- VEXZGXHMUGYJMC-UHFFFAOYSA-N Hydrochloric acid Chemical compound Cl VEXZGXHMUGYJMC-UHFFFAOYSA-N 0.000 description 2
- 229920002518 Polyallylamine hydrochloride Polymers 0.000 description 2
- 229920002873 Polyethylenimine Polymers 0.000 description 2
- 238000002441 X-ray diffraction Methods 0.000 description 2
- 230000009471 action Effects 0.000 description 2
- 239000007864 aqueous solution Substances 0.000 description 2
- 229920006317 cationic polymer Polymers 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 2
- 238000004140 cleaning Methods 0.000 description 2
- 239000003302 ferromagnetic material Substances 0.000 description 2
- 230000004907 flux Effects 0.000 description 2
- 238000004599 local-density approximation Methods 0.000 description 2
- 230000005415 magnetization Effects 0.000 description 2
- 150000002739 metals Chemical group 0.000 description 2
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 description 2
- 229920000642 polymer Polymers 0.000 description 2
- 229910052761 rare earth metal Inorganic materials 0.000 description 2
- 150000002910 rare earth metals Chemical class 0.000 description 2
- 230000001105 regulatory effect Effects 0.000 description 2
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 2
- 229910020632 Co Mn Inorganic materials 0.000 description 1
- 229910020678 Co—Mn Inorganic materials 0.000 description 1
- 229910010413 TiO 2 Inorganic materials 0.000 description 1
- 239000002253 acid Substances 0.000 description 1
- 238000010306 acid treatment Methods 0.000 description 1
- 229910001413 alkali metal ion Inorganic materials 0.000 description 1
- 150000001412 amines Chemical class 0.000 description 1
- 125000004429 atom Chemical group 0.000 description 1
- 230000033228 biological regulation Effects 0.000 description 1
- 238000002983 circular dichroism Methods 0.000 description 1
- 238000010276 construction Methods 0.000 description 1
- 230000001276 controlling effect Effects 0.000 description 1
- 238000013461 design Methods 0.000 description 1
- 238000000572 ellipsometry Methods 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 description 1
- 229910052737 gold Inorganic materials 0.000 description 1
- 239000010931 gold Substances 0.000 description 1
- 230000036571 hydration Effects 0.000 description 1
- 238000006703 hydration reaction Methods 0.000 description 1
- 229910052739 hydrogen Inorganic materials 0.000 description 1
- 239000001257 hydrogen Substances 0.000 description 1
- -1 hydrogen ions Chemical group 0.000 description 1
- 230000006872 improvement Effects 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
- 239000002120 nanofilm Substances 0.000 description 1
- 238000005457 optimization Methods 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000000737 periodic effect Effects 0.000 description 1
- 229920003023 plastic Polymers 0.000 description 1
- 229910052697 platinum Inorganic materials 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000012545 processing Methods 0.000 description 1
- 230000009467 reduction Effects 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 238000001338 self-assembly Methods 0.000 description 1
- 230000005476 size effect Effects 0.000 description 1
- 150000003609 titanium compounds Chemical class 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
Classifications
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B5/00—Recording by magnetisation or demagnetisation of a record carrier; Reproducing by magnetic means; Record carriers therefor
- G11B5/62—Record carriers characterised by the selection of the material
- G11B5/64—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent
- G11B5/65—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition
- G11B5/658—Record carriers characterised by the selection of the material comprising only the magnetic material without bonding agent characterised by its composition containing oxygen, e.g. molecular oxygen or magnetic oxide
-
- G—PHYSICS
- G02—OPTICS
- G02F—OPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
- G02F1/00—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
- G02F1/01—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour
- G02F1/09—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect
- G02F1/093—Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour based on magneto-optical elements, e.g. exhibiting Faraday effect used as non-reciprocal devices, e.g. optical isolators, circulators
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10532—Heads
- G11B11/10541—Heads for reproducing
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
- G11B11/10584—Record carriers characterised by the selection of the material or by the structure or form characterised by the form, e.g. comprising mechanical protection elements
-
- G—PHYSICS
- G11—INFORMATION STORAGE
- G11B—INFORMATION STORAGE BASED ON RELATIVE MOVEMENT BETWEEN RECORD CARRIER AND TRANSDUCER
- G11B11/00—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor
- G11B11/10—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field
- G11B11/105—Recording on or reproducing from the same record carrier wherein for these two operations the methods are covered by different main groups of groups G11B3/00 - G11B7/00 or by different subgroups of group G11B9/00; Record carriers therefor using recording by magnetic means or other means for magnetisation or demagnetisation of a record carrier, e.g. light induced spin magnetisation; Demagnetisation by thermal or stress means in the presence or not of an orienting magnetic field using a beam of light or a magnetic field for recording by change of magnetisation and a beam of light for reproducing, i.e. magneto-optical, e.g. light-induced thermomagnetic recording, spin magnetisation recording, Kerr or Faraday effect reproducing
- G11B11/10582—Record carriers characterised by the selection of the material or by the structure or form
- G11B11/10586—Record carriers characterised by the selection of the material or by the structure or form characterised by the selection of the material
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
- H01F10/00—Thin magnetic films, e.g. of one-domain structure
- H01F10/08—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers
- H01F10/10—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition
- H01F10/18—Thin magnetic films, e.g. of one-domain structure characterised by magnetic layers characterised by the composition being compounds
- H01F10/193—Magnetic semiconductor compounds
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- General Physics & Mathematics (AREA)
- Optics & Photonics (AREA)
- Inorganic Compounds Of Heavy Metals (AREA)
- Thin Magnetic Films (AREA)
- Optical Modulation, Optical Deflection, Nonlinear Optics, Optical Demodulation, Optical Logic Elements (AREA)
Abstract
Description
このため、機能、コスト、環境面で今後重要性を増す超大容量波長多重通信には対応できず、光通信システム開発の最大の課題となっている。
特に、鉛の含有は現在深刻な環境問題であり、2006年7月欧州連合では、電気・電子機器に含まれる鉛をRoHS指令により環境規制対象物質として撤廃することで決定した。しかし、通信装置に組み込まれる光アイソレータについては、現在代替材料がないため例外措置として鉛含有基準を1000ppm以下に規制する方向で進められているが、将来的には非鉛系材料への代替が望まれている。
その一つの手段として、最近、本発明者等は、ナノ材料を基幹ブロックにして低コストの室温溶液プロセスを用いた自己組織化反応によりCo置換チタニアナノシートとFe置換チタニアナノシートを交互に積んで、Co−Feの相互作用を使う多層膜や超格子を作製すれば、紫外光から可視光波長領域(260−500nm)に応答し、かつ既存の磁気光学材料を大きく凌ぐ世界最高の磁気光学効果(300,000度/cm)を有する磁気光学素子の製造が可能となることを見出した(WO2007/069638)。
本発明の磁性ナノ薄膜は、今後一層の高性能化が期待される高速光ネットワークに対して、安価で高性能の光アイソレータや、半導体レーザや各種光部品と融合した高機能光集積回路を実現できるため、インターネットのさらなる普及や高度情報通信をベースとするユビキタス社会の発展に貢献できる。また、磁気光学効果を利用したデバイスは、光アイソレータ以外にも、光磁気記録素子、光磁界センサ、光スイッチなど広範な応用があるため、本発明により提供される優れた磁気光学特性を有する磁性ナノ薄膜は、これらの技術分野に適用しても極めて有用である。
そしてこの図1の実施形態では、上記の磁性元素同時置換チタニアナノシート3が積層された状態であることを例示している。
なお、本発明においては、基板1は、石英ガラスまたはSi基板に限定されることはなく、プラスチックなどの他の種類の基板であってもよく、基板上に金、白金等の金属電極が設けられたものの上に、同様に磁性元素同時置換チタニアナノシートが配設されていてもよい。
本発明の磁性ナノ薄膜は、主としてこのような磁性元素同時置換チタニアナノシートもしくはその積層をもって構成されるものであるが、ここで、たとえば好適にはナノシートは、厚み約1nm、横サイズ200nm〜100μmの粒子サイズを有してよい。
なお、本発明は以下の実施例によって限定されるものでないことは言うまでもない。
すなわち順番に吸着・累積されたナノシートとPDDAが製膜後に、入り乱れることなく、整然とした多層ナノ構造を保持していることを示している。より直接的な製膜プロセスのモニター法として、紫外・可視吸収スペクトルやエリプソメトリーによる膜厚の測定があげられる。各吸着操作毎に膜厚がサブnm〜μmのレンジで段階的に増大していく様子が読み取れる。すなわち膜厚をこのような極めて微細な領域でコントロールできることになる。
図4(a)に示したように、Co置換チタニアナノシート多層膜、Fe置換チタニアナノシート多層膜は、紫外線領域に応答を持ち、それぞれ固有の約10,000度/cmの磁気光学効果を示した。他方、Co,Fe同時置換チタニアナノシート多層膜(Ti0.75Co0.15Fe0.1O2)10は、図4(b)に示したように、紫外光から近赤外光の広い波長領域(波長300−800nm)において10倍以上増強した約130,000度/cmの巨大な磁気光学効果を示した。
また、これらの光学吸収ピークは、図4(b)に示したCo,Fe同時置換チタニアナノシート多層膜(Ti0.75Co0.15Fe0.1O2)で観測された磁気光学ピークのエネルギー(300−460nm、500−800nm付近)と対応していた。これより、Co,Fe同時置換チタニアナノシートの磁気光学ピークは、Co2+(d7)-Fe3+(d5)の強い磁気的相互作用に起因しており、同時置換によりナノシート内の磁気的相互作用を変化させることで、CoあるいはFeの単体置換チタニアナノシートで実現しえないCo-Feのd-d遷移の制御が実現し、応答波長の拡大と共に、強度増大が引き起こされたものと考えられる。
中でも、磁気光学効果は光アイソレータとして使える他にない特性であり、磁気光学効果を利用した光アイソレータは光通信のあらゆるシステムに組み込まれている。光情報通信の波長に応じて大きな磁気光学特性を示す材料は特に注目すべき材料であり、本発明の磁性元素同時置換チタニアナノシートは紫外から近赤外光までの広い波長領域高い磁気光学特性を有することから、このような用途に非常に有効である。たとえば、磁性元素同時置換チタニアナノシートを用いた様々な波長のレーザに応答する磁気光学素子や磁気機能を有する磁性素子が実現可能である。
Claims (7)
- 磁性ナノ薄膜を用いた非鉛系磁性光学素子であって、前記磁性ナノ薄膜が、チタン格子位置に2種以上の異なる磁性元素を同時置換した層状チタン酸化物を単層剥離して得られる磁性元素同時置換チタニアナノシートからなることを特徴とする非鉛系磁性光学素子。
- 前記磁性元素同時置換チタニアナノシートが、組成式Ti1−x−yMxM’yO2(ただし、Mは、V、Cr、Mn、Fe、Co、Ni、Cuから選ばれる磁性金属、M’は、V、Cr、Mn、Fe、Co、Ni、Cuから選ばれるM以外の磁性金属少なくとも1種、0<x+y<1)で示されることを特徴とする請求項1に記載の非鉛系磁性光学素子。
- MとM'が同一元素であり、MとM'の価数が相互に異ならせてあることを特徴とする請求項2に記載の非鉛系磁性光学素子。
- 前記磁性元素同時置換チタニアナノシートが、組成式Ti1−x−yCoxFeyO2(ただし、0<x+y<1)で示されることを特徴とする請求項1に記載の非鉛系磁性光学素子。
- 前記磁性ナノ薄膜は、磁性元素同時置換チタニアナノシートと、有機ポリマー、無機高分子、金属錯体または多核水和物イオンを含む無機化合物の少なくともいずれかの1種の薄膜が組み合わされた薄膜であることを特徴とする請求項1から4のいずれかに記載の非鉛系磁性光学素子。
- 請求項1から5のいずれかに記載の非鉛系磁性光学素子の製造方法であって,チタン格子位置に2種以上の異なる磁性元素を同時置換した層状チタン酸化物を単層剥離して得られる磁性元素同時置換チタニアナノシートを、カチオン性物質として有機ポリカチオンを介して基板上に積層してその磁性ナノ薄膜を形成することを特徴とする非鉛系磁性光学素子の製造方法。
- 磁性元素同時置換チタニアナノシートを基板上にスピンコートまたはディップコートすることにより磁性ナノ薄膜を形成することを特徴とする請求項6に記載の非鉛系磁性光学素子の製造方法。
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