JPS649351U - - Google Patents
Info
- Publication number
- JPS649351U JPS649351U JP10304887U JP10304887U JPS649351U JP S649351 U JPS649351 U JP S649351U JP 10304887 U JP10304887 U JP 10304887U JP 10304887 U JP10304887 U JP 10304887U JP S649351 U JPS649351 U JP S649351U
- Authority
- JP
- Japan
- Prior art keywords
- door
- ion processing
- roller
- main body
- vacuum chamber
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005468 ion implantation Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Electrodes Of Semiconductors (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10304887U JPS649351U (OSRAM) | 1987-07-04 | 1987-07-04 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10304887U JPS649351U (OSRAM) | 1987-07-04 | 1987-07-04 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS649351U true JPS649351U (OSRAM) | 1989-01-19 |
Family
ID=31333512
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10304887U Pending JPS649351U (OSRAM) | 1987-07-04 | 1987-07-04 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS649351U (OSRAM) |
-
1987
- 1987-07-04 JP JP10304887U patent/JPS649351U/ja active Pending