JPS649171U - - Google Patents
Info
- Publication number
- JPS649171U JPS649171U JP10407987U JP10407987U JPS649171U JP S649171 U JPS649171 U JP S649171U JP 10407987 U JP10407987 U JP 10407987U JP 10407987 U JP10407987 U JP 10407987U JP S649171 U JPS649171 U JP S649171U
- Authority
- JP
- Japan
- Prior art keywords
- spring
- rod
- stopper
- separators
- coming
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004308 accommodation Effects 0.000 description 1
- 230000037431 insertion Effects 0.000 description 1
- 238000003780 insertion Methods 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
Landscapes
- Packages (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10407987U JPS649171U (enExample) | 1987-07-06 | 1987-07-06 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10407987U JPS649171U (enExample) | 1987-07-06 | 1987-07-06 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS649171U true JPS649171U (enExample) | 1989-01-18 |
Family
ID=31335479
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10407987U Pending JPS649171U (enExample) | 1987-07-06 | 1987-07-06 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS649171U (enExample) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0338051A (ja) * | 1989-06-29 | 1991-02-19 | Applied Materials Inc | 半導体ウェーハのハンドリング方法及び装置 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS628979B2 (enExample) * | 1981-09-29 | 1987-02-25 | Fujitsu Ltd |
-
1987
- 1987-07-06 JP JP10407987U patent/JPS649171U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS628979B2 (enExample) * | 1981-09-29 | 1987-02-25 | Fujitsu Ltd |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0338051A (ja) * | 1989-06-29 | 1991-02-19 | Applied Materials Inc | 半導体ウェーハのハンドリング方法及び装置 |