JPS649171U - - Google Patents

Info

Publication number
JPS649171U
JPS649171U JP10407987U JP10407987U JPS649171U JP S649171 U JPS649171 U JP S649171U JP 10407987 U JP10407987 U JP 10407987U JP 10407987 U JP10407987 U JP 10407987U JP S649171 U JPS649171 U JP S649171U
Authority
JP
Japan
Prior art keywords
spring
rod
stopper
separators
coming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10407987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10407987U priority Critical patent/JPS649171U/ja
Publication of JPS649171U publication Critical patent/JPS649171U/ja
Pending legal-status Critical Current

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Landscapes

  • Packages (AREA)
JP10407987U 1987-07-06 1987-07-06 Pending JPS649171U (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10407987U JPS649171U (OSRAM) 1987-07-06 1987-07-06

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10407987U JPS649171U (OSRAM) 1987-07-06 1987-07-06

Publications (1)

Publication Number Publication Date
JPS649171U true JPS649171U (OSRAM) 1989-01-18

Family

ID=31335479

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10407987U Pending JPS649171U (OSRAM) 1987-07-06 1987-07-06

Country Status (1)

Country Link
JP (1) JPS649171U (OSRAM)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338051A (ja) * 1989-06-29 1991-02-19 Applied Materials Inc 半導体ウェーハのハンドリング方法及び装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS628979B2 (OSRAM) * 1981-09-29 1987-02-25 Fujitsu Ltd

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS628979B2 (OSRAM) * 1981-09-29 1987-02-25 Fujitsu Ltd

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0338051A (ja) * 1989-06-29 1991-02-19 Applied Materials Inc 半導体ウェーハのハンドリング方法及び装置

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