JPS6487779A - Formation of metal oxide film - Google Patents

Formation of metal oxide film

Info

Publication number
JPS6487779A
JPS6487779A JP24551787A JP24551787A JPS6487779A JP S6487779 A JPS6487779 A JP S6487779A JP 24551787 A JP24551787 A JP 24551787A JP 24551787 A JP24551787 A JP 24551787A JP S6487779 A JPS6487779 A JP S6487779A
Authority
JP
Japan
Prior art keywords
metal
thickener
solvent
temp
substrate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP24551787A
Other languages
Japanese (ja)
Inventor
Koichi Hara
Akira Ikushima
Katsuaki Uchida
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hoya Corp
Original Assignee
Hoya Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hoya Corp filed Critical Hoya Corp
Priority to JP24551787A priority Critical patent/JPS6487779A/en
Publication of JPS6487779A publication Critical patent/JPS6487779A/en
Pending legal-status Critical Current

Links

Classifications

    • C—CHEMISTRY; METALLURGY
    • C23—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23C—COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; SURFACE TREATMENT OF METALLIC MATERIAL BY DIFFUSION INTO THE SURFACE, BY CHEMICAL CONVERSION OR SUBSTITUTION; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL
    • C23C18/00—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating
    • C23C18/02—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition
    • C23C18/12—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material
    • C23C18/1204—Chemical coating by decomposition of either liquid compounds or solutions of the coating forming compounds, without leaving reaction products of surface material in the coating; Contact plating by thermal decomposition characterised by the deposition of inorganic material other than metallic material inorganic material, e.g. non-oxide and non-metallic such as sulfides, nitrides based compounds
    • C23C18/1208—Oxides, e.g. ceramics
    • C23C18/1216—Metal oxides

Landscapes

  • Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Ceramic Engineering (AREA)
  • Inorganic Chemistry (AREA)
  • Physics & Mathematics (AREA)
  • Thermal Sciences (AREA)
  • General Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Chemically Coating (AREA)

Abstract

PURPOSE:To efficiently and easily form a metal oxide film by coating a substrate with a mixed soln. contg. a metal carboxylate represented by a specified general formula, a thickener and a solvent and by heating and holding the mixed soln. at a temp. above the oxidation temp. of the carboxylate. CONSTITUTION:A substrate is coated with a mixed soln. contg. a metal carboxylate represented by a general formula M[CnH2n+1COO]m (where M is a metal, m is the coordination number of the metal M and n is an integer of 1-6), a thickener and a solvent. The mixed soln. for coating on the substrate is heated and held at least once at a temp. above the oxidation temp. of the carboxylate. The metal M is preferably a metallic element present in the 2nd - the 6th periods of the groups Ia, IIa, IIIb, IVb, Vb, VIb, VIIb, VIII, Ib, IIb, IIIa, IVa and Va of the periodic table. The thickener is preferably an org. thickener. Water is preferably used as the solvent but a mixture of water with an org. solvent may be used as required.
JP24551787A 1987-09-29 1987-09-29 Formation of metal oxide film Pending JPS6487779A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP24551787A JPS6487779A (en) 1987-09-29 1987-09-29 Formation of metal oxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP24551787A JPS6487779A (en) 1987-09-29 1987-09-29 Formation of metal oxide film

Publications (1)

Publication Number Publication Date
JPS6487779A true JPS6487779A (en) 1989-03-31

Family

ID=17134859

Family Applications (1)

Application Number Title Priority Date Filing Date
JP24551787A Pending JPS6487779A (en) 1987-09-29 1987-09-29 Formation of metal oxide film

Country Status (1)

Country Link
JP (1) JPS6487779A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0597284A1 (en) * 1992-11-12 1994-05-18 Vacuumschmelze GmbH Insulating process for soft magnetic strips

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
EP0597284A1 (en) * 1992-11-12 1994-05-18 Vacuumschmelze GmbH Insulating process for soft magnetic strips

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