JPS6487776A - Method and device for vapor growth by light plasma - Google Patents
Method and device for vapor growth by light plasmaInfo
- Publication number
- JPS6487776A JPS6487776A JP5631688A JP5631688A JPS6487776A JP S6487776 A JPS6487776 A JP S6487776A JP 5631688 A JP5631688 A JP 5631688A JP 5631688 A JP5631688 A JP 5631688A JP S6487776 A JPS6487776 A JP S6487776A
- Authority
- JP
- Japan
- Prior art keywords
- nozzle
- substrate
- plasma
- hot plasma
- diamond
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Chemical Vapour Deposition (AREA)
Abstract
PURPOSE:To increase the speed of forming films consisting of diamond, BN, etc., by utilizing the hot plasma which is generated by optical arc discharge using a condensed large-output laser beam as a plasma jet. CONSTITUTION:The plasma beam A generated by using the laser 1 is introduced from a condenser lens 2 to an optical cone 3 and is ejected as the hot plasma jet B from a nozzle 5. The nozzle 5 opens into a vacuum chamber 10 and blows the hot plasma toward a substrate 7 spaced at a prescribed distance from the nozzle 5. The nozzle 5 and a substrate holder 8 are cooled respectively by cooling water pipes 6, 9 and the substrate temp. is controlled to a prescribed temp. to rapidly cool the hot plasma. The films consisting of diamond, etc., are grown at a high speed on the substrate 7 by this method.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP5631688A JPH0660411B2 (en) | 1987-06-10 | 1988-03-11 | Optical plasma vapor phase synthesis method and apparatus |
Applications Claiming Priority (3)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14325687 | 1987-06-10 | ||
JP62-143256 | 1987-06-10 | ||
JP5631688A JPH0660411B2 (en) | 1987-06-10 | 1988-03-11 | Optical plasma vapor phase synthesis method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6487776A true JPS6487776A (en) | 1989-03-31 |
JPH0660411B2 JPH0660411B2 (en) | 1994-08-10 |
Family
ID=26397267
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP5631688A Expired - Lifetime JPH0660411B2 (en) | 1987-06-10 | 1988-03-11 | Optical plasma vapor phase synthesis method and apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0660411B2 (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005534813A (en) * | 2002-08-06 | 2005-11-17 | サン−ゴバン グラス フランス | Method for forming a coating on plastic glass |
-
1988
- 1988-03-11 JP JP5631688A patent/JPH0660411B2/en not_active Expired - Lifetime
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2005534813A (en) * | 2002-08-06 | 2005-11-17 | サン−ゴバン グラス フランス | Method for forming a coating on plastic glass |
Also Published As
Publication number | Publication date |
---|---|
JPH0660411B2 (en) | 1994-08-10 |
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