JPS6487776A - Method and device for vapor growth by light plasma - Google Patents

Method and device for vapor growth by light plasma

Info

Publication number
JPS6487776A
JPS6487776A JP5631688A JP5631688A JPS6487776A JP S6487776 A JPS6487776 A JP S6487776A JP 5631688 A JP5631688 A JP 5631688A JP 5631688 A JP5631688 A JP 5631688A JP S6487776 A JPS6487776 A JP S6487776A
Authority
JP
Japan
Prior art keywords
nozzle
substrate
plasma
hot plasma
diamond
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP5631688A
Other languages
Japanese (ja)
Other versions
JPH0660411B2 (en
Inventor
Kazuaki Kurihara
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP5631688A priority Critical patent/JPH0660411B2/en
Publication of JPS6487776A publication Critical patent/JPS6487776A/en
Publication of JPH0660411B2 publication Critical patent/JPH0660411B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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  • Crystals, And After-Treatments Of Crystals (AREA)
  • Chemical Vapour Deposition (AREA)

Abstract

PURPOSE:To increase the speed of forming films consisting of diamond, BN, etc., by utilizing the hot plasma which is generated by optical arc discharge using a condensed large-output laser beam as a plasma jet. CONSTITUTION:The plasma beam A generated by using the laser 1 is introduced from a condenser lens 2 to an optical cone 3 and is ejected as the hot plasma jet B from a nozzle 5. The nozzle 5 opens into a vacuum chamber 10 and blows the hot plasma toward a substrate 7 spaced at a prescribed distance from the nozzle 5. The nozzle 5 and a substrate holder 8 are cooled respectively by cooling water pipes 6, 9 and the substrate temp. is controlled to a prescribed temp. to rapidly cool the hot plasma. The films consisting of diamond, etc., are grown at a high speed on the substrate 7 by this method.
JP5631688A 1987-06-10 1988-03-11 Optical plasma vapor phase synthesis method and apparatus Expired - Lifetime JPH0660411B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP5631688A JPH0660411B2 (en) 1987-06-10 1988-03-11 Optical plasma vapor phase synthesis method and apparatus

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP14325687 1987-06-10
JP62-143256 1987-06-10
JP5631688A JPH0660411B2 (en) 1987-06-10 1988-03-11 Optical plasma vapor phase synthesis method and apparatus

Publications (2)

Publication Number Publication Date
JPS6487776A true JPS6487776A (en) 1989-03-31
JPH0660411B2 JPH0660411B2 (en) 1994-08-10

Family

ID=26397267

Family Applications (1)

Application Number Title Priority Date Filing Date
JP5631688A Expired - Lifetime JPH0660411B2 (en) 1987-06-10 1988-03-11 Optical plasma vapor phase synthesis method and apparatus

Country Status (1)

Country Link
JP (1) JPH0660411B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005534813A (en) * 2002-08-06 2005-11-17 サン−ゴバン グラス フランス Method for forming a coating on plastic glass

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005534813A (en) * 2002-08-06 2005-11-17 サン−ゴバン グラス フランス Method for forming a coating on plastic glass

Also Published As

Publication number Publication date
JPH0660411B2 (en) 1994-08-10

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