JPS6486210A - Automatic micro-positioning method and device - Google Patents

Automatic micro-positioning method and device

Info

Publication number
JPS6486210A
JPS6486210A JP24321987A JP24321987A JPS6486210A JP S6486210 A JPS6486210 A JP S6486210A JP 24321987 A JP24321987 A JP 24321987A JP 24321987 A JP24321987 A JP 24321987A JP S6486210 A JPS6486210 A JP S6486210A
Authority
JP
Japan
Prior art keywords
positioning
actuator
force
friction force
driving circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP24321987A
Other languages
Japanese (ja)
Other versions
JP2541164B2 (en
Inventor
Takashi Nagase
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Yaskawa Electric Corp
Original Assignee
Yaskawa Electric Manufacturing Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Yaskawa Electric Manufacturing Co Ltd filed Critical Yaskawa Electric Manufacturing Co Ltd
Priority to JP62243219A priority Critical patent/JP2541164B2/en
Publication of JPS6486210A publication Critical patent/JPS6486210A/en
Application granted granted Critical
Publication of JP2541164B2 publication Critical patent/JP2541164B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

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  • Control Of Position Or Direction (AREA)

Abstract

PURPOSE:To attain the positioning to a micron unit by adding an impact force to overcome the static friction force of an object to be moved, making the object into the dynamic friction force condition having a small friction force and executing the positioning. CONSTITUTION:The device is composed of an actuator composed of a linear micrometer 12 to give a static external force from an external part to a rotary disk 3 and a coupling 16, a motor 17 for control an actuator to control it and a driving circuit 18, a fine adjusting actuator 15 fitted to the tip of the actuator and a driving circuit 21, a fine adjusting signal generating circuit 19, a motor 20 for controlling a rotational angle and its driving circuit 21, a television camera 14 for detecting the eccentricity of a slit and its picture processor 23 and a control circuit 22. At the time of positioning, first, the fine adjusting of the impact force larger than the static friction force is added to the disk 3. In this condition, the sliding to give a static pressure force and execute the positioning is executed and the positioning of the micro-dimension can be correctly and automatically executed.
JP62243219A 1987-09-28 1987-09-28 Encoder eccentricity adjustment method and apparatus Expired - Fee Related JP2541164B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62243219A JP2541164B2 (en) 1987-09-28 1987-09-28 Encoder eccentricity adjustment method and apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62243219A JP2541164B2 (en) 1987-09-28 1987-09-28 Encoder eccentricity adjustment method and apparatus

Publications (2)

Publication Number Publication Date
JPS6486210A true JPS6486210A (en) 1989-03-30
JP2541164B2 JP2541164B2 (en) 1996-10-09

Family

ID=17100599

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62243219A Expired - Fee Related JP2541164B2 (en) 1987-09-28 1987-09-28 Encoder eccentricity adjustment method and apparatus

Country Status (1)

Country Link
JP (1) JP2541164B2 (en)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6065310A (en) * 1983-09-20 1985-04-15 Matsushita Electric Ind Co Ltd Data producer
JPS62159088A (en) * 1986-01-07 1987-07-15 キヤノン株式会社 Moving stage device

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6065310A (en) * 1983-09-20 1985-04-15 Matsushita Electric Ind Co Ltd Data producer
JPS62159088A (en) * 1986-01-07 1987-07-15 キヤノン株式会社 Moving stage device

Also Published As

Publication number Publication date
JP2541164B2 (en) 1996-10-09

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees