JPS6486210A - Automatic micro-positioning method and device - Google Patents
Automatic micro-positioning method and deviceInfo
- Publication number
- JPS6486210A JPS6486210A JP24321987A JP24321987A JPS6486210A JP S6486210 A JPS6486210 A JP S6486210A JP 24321987 A JP24321987 A JP 24321987A JP 24321987 A JP24321987 A JP 24321987A JP S6486210 A JPS6486210 A JP S6486210A
- Authority
- JP
- Japan
- Prior art keywords
- positioning
- actuator
- force
- friction force
- driving circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
Landscapes
- Control Of Position Or Direction (AREA)
Abstract
PURPOSE:To attain the positioning to a micron unit by adding an impact force to overcome the static friction force of an object to be moved, making the object into the dynamic friction force condition having a small friction force and executing the positioning. CONSTITUTION:The device is composed of an actuator composed of a linear micrometer 12 to give a static external force from an external part to a rotary disk 3 and a coupling 16, a motor 17 for control an actuator to control it and a driving circuit 18, a fine adjusting actuator 15 fitted to the tip of the actuator and a driving circuit 21, a fine adjusting signal generating circuit 19, a motor 20 for controlling a rotational angle and its driving circuit 21, a television camera 14 for detecting the eccentricity of a slit and its picture processor 23 and a control circuit 22. At the time of positioning, first, the fine adjusting of the impact force larger than the static friction force is added to the disk 3. In this condition, the sliding to give a static pressure force and execute the positioning is executed and the positioning of the micro-dimension can be correctly and automatically executed.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62243219A JP2541164B2 (en) | 1987-09-28 | 1987-09-28 | Encoder eccentricity adjustment method and apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62243219A JP2541164B2 (en) | 1987-09-28 | 1987-09-28 | Encoder eccentricity adjustment method and apparatus |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6486210A true JPS6486210A (en) | 1989-03-30 |
JP2541164B2 JP2541164B2 (en) | 1996-10-09 |
Family
ID=17100599
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62243219A Expired - Fee Related JP2541164B2 (en) | 1987-09-28 | 1987-09-28 | Encoder eccentricity adjustment method and apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JP2541164B2 (en) |
Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6065310A (en) * | 1983-09-20 | 1985-04-15 | Matsushita Electric Ind Co Ltd | Data producer |
JPS62159088A (en) * | 1986-01-07 | 1987-07-15 | キヤノン株式会社 | Moving stage device |
-
1987
- 1987-09-28 JP JP62243219A patent/JP2541164B2/en not_active Expired - Fee Related
Patent Citations (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6065310A (en) * | 1983-09-20 | 1985-04-15 | Matsushita Electric Ind Co Ltd | Data producer |
JPS62159088A (en) * | 1986-01-07 | 1987-07-15 | キヤノン株式会社 | Moving stage device |
Also Published As
Publication number | Publication date |
---|---|
JP2541164B2 (en) | 1996-10-09 |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
LAPS | Cancellation because of no payment of annual fees |