JPS6471190A - Discharge type excimer laser device - Google Patents
Discharge type excimer laser deviceInfo
- Publication number
- JPS6471190A JPS6471190A JP62227923A JP22792387A JPS6471190A JP S6471190 A JPS6471190 A JP S6471190A JP 62227923 A JP62227923 A JP 62227923A JP 22792387 A JP22792387 A JP 22792387A JP S6471190 A JPS6471190 A JP S6471190A
- Authority
- JP
- Japan
- Prior art keywords
- capacitor
- coil
- power source
- charging power
- charged
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S3/00—Lasers, i.e. devices using stimulated emission of electromagnetic radiation in the infrared, visible or ultraviolet wave range
- H01S3/09—Processes or apparatus for excitation, e.g. pumping
- H01S3/097—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser
- H01S3/0971—Processes or apparatus for excitation, e.g. pumping by gas discharge of a gas laser transversely excited
Landscapes
- Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Engineering & Computer Science (AREA)
- Plasma & Fusion (AREA)
- Optics & Photonics (AREA)
- Lasers (AREA)
Abstract
PURPOSE:To speed up the rate of threshold voltage and make discharge uniform, by mounting a gap for pre-ionization in parallel to capacitors located between the first charging power source and an electrode and forming a capacity migration circuit according to the capacitors and inductances. CONSTITUTION:After turning a switch SW 2 OFF, the fourth capacitor 4 is charged by a current passing from the first charging power source V1 to ground through a coil 7, a capacitor C4, and the coil 4. Simultaneously, the second capacitor 2 is charged by a current passing from the second charging power source V2 to ground through inductance L5, resistance R1, capacitor C2, inductance L2, and the coil 4. If the switch SW 2 is turned ON, electric charge which is changed into the capacitor 4 performs capacity migration into the capacitor C1. When the charged voltage of the first capacitor C1 comes to around a peak value, the gap of a gap electrode G allows an ultraviolet spark to start flying so as to have continuity. The ultraviolet spark pre-ionizes a laser gas.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62227923A JPS6471190A (en) | 1987-09-11 | 1987-09-11 | Discharge type excimer laser device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62227923A JPS6471190A (en) | 1987-09-11 | 1987-09-11 | Discharge type excimer laser device |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6471190A true JPS6471190A (en) | 1989-03-16 |
Family
ID=16868413
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62227923A Pending JPS6471190A (en) | 1987-09-11 | 1987-09-11 | Discharge type excimer laser device |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6471190A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02117187A (en) * | 1988-10-27 | 1990-05-01 | Toshiba Corp | Pulse laser apparatus |
-
1987
- 1987-09-11 JP JP62227923A patent/JPS6471190A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPH02117187A (en) * | 1988-10-27 | 1990-05-01 | Toshiba Corp | Pulse laser apparatus |
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