JPS646582U - - Google Patents

Info

Publication number
JPS646582U
JPS646582U JP10090987U JP10090987U JPS646582U JP S646582 U JPS646582 U JP S646582U JP 10090987 U JP10090987 U JP 10090987U JP 10090987 U JP10090987 U JP 10090987U JP S646582 U JPS646582 U JP S646582U
Authority
JP
Japan
Prior art keywords
gate valve
sensor
valve according
valve
connecting passage
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP10090987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10090987U priority Critical patent/JPS646582U/ja
Publication of JPS646582U publication Critical patent/JPS646582U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Indication Of The Valve Opening Or Closing Status (AREA)
JP10090987U 1987-07-02 1987-07-02 Pending JPS646582U (US07652168-20100126-C00068.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10090987U JPS646582U (US07652168-20100126-C00068.png) 1987-07-02 1987-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10090987U JPS646582U (US07652168-20100126-C00068.png) 1987-07-02 1987-07-02

Publications (1)

Publication Number Publication Date
JPS646582U true JPS646582U (US07652168-20100126-C00068.png) 1989-01-13

Family

ID=31329416

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10090987U Pending JPS646582U (US07652168-20100126-C00068.png) 1987-07-02 1987-07-02

Country Status (1)

Country Link
JP (1) JPS646582U (US07652168-20100126-C00068.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE39776E1 (en) 1990-08-29 2007-08-21 Hitachi, Ltd. Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441075A (en) * 1977-09-07 1979-03-31 Nippon Telegr & Teleph Corp <Ntt> Conveying device between atmospheric pressure and vacuum

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5441075A (en) * 1977-09-07 1979-03-31 Nippon Telegr & Teleph Corp <Ntt> Conveying device between atmospheric pressure and vacuum

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
USRE39776E1 (en) 1990-08-29 2007-08-21 Hitachi, Ltd. Vacuum processing apparatus and operating method with wafers, substrates and/or semiconductors

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