JPS646582A - Shutoff valve unit with nozzle - Google Patents
Shutoff valve unit with nozzleInfo
- Publication number
- JPS646582A JPS646582A JP16330587A JP16330587A JPS646582A JP S646582 A JPS646582 A JP S646582A JP 16330587 A JP16330587 A JP 16330587A JP 16330587 A JP16330587 A JP 16330587A JP S646582 A JPS646582 A JP S646582A
- Authority
- JP
- Japan
- Prior art keywords
- valve unit
- pressure receiving
- receiving plate
- flange
- spring
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Abstract
PURPOSE:To permit a vale unit to accurately set its stroke distance for a nozzle by arranging a pressure receiving plate in the side of a spring in its adapted face to a flange while interposing a spacer plate of predetermined thickness being able to be mounted and removed existing in the bottom surface of the pressure receiving plate. CONSTITUTION:A shutoff valve unit 1 comprises a solenoid 3 fixed to the back part of a flange 2 and a valve unit 5 connected to a plunger 4 of the solenoid 3. The unit 1 adapts the upper part side of a spring 6 to the bottom surface of the valve unit 5 while receives the bottom part side to a pressure receiving plate 18 positioned in the center part of the flange 2. A spacer plate 19, which opens a horseshoe-shaped insertion groove 19a to the side part, is interposed existing in the bottom surface of the pressure receiving plate 18. The spacer plate 19 is prepared using various thickness in accordance with unevenness of tension of the spring 6.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16330587A JPS646582A (en) | 1987-06-30 | 1987-06-30 | Shutoff valve unit with nozzle |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16330587A JPS646582A (en) | 1987-06-30 | 1987-06-30 | Shutoff valve unit with nozzle |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS646582A true JPS646582A (en) | 1989-01-11 |
Family
ID=15771302
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16330587A Pending JPS646582A (en) | 1987-06-30 | 1987-06-30 | Shutoff valve unit with nozzle |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS646582A (en) |
Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US5145146A (en) * | 1991-04-15 | 1992-09-08 | Yazaki Corporation | Nozzle support arrangement in electromagnetic valve |
US6070341A (en) * | 1990-08-29 | 2000-06-06 | Hitachi, Ltd. | Vacuum processing and operating method with wafers, substrates and/or semiconductors |
US7089680B1 (en) | 1990-08-29 | 2006-08-15 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
USRE39775E1 (en) * | 1990-08-29 | 2007-08-21 | Hitachi, Ltd. | Vacuum processing operating method with wafers, substrates and/or semiconductors |
-
1987
- 1987-06-30 JP JP16330587A patent/JPS646582A/en active Pending
Cited By (20)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
US6634116B2 (en) | 1990-08-09 | 2003-10-21 | Hitachi, Ltd. | Vacuum processing apparatus |
US6484415B2 (en) | 1990-08-29 | 2002-11-26 | Hitachi, Ltd. | Vacuum processing apparatus |
USRE39775E1 (en) * | 1990-08-29 | 2007-08-21 | Hitachi, Ltd. | Vacuum processing operating method with wafers, substrates and/or semiconductors |
US6473989B2 (en) | 1990-08-29 | 2002-11-05 | Hitachi, Ltd. | Conveying system for a vacuum processing apparatus |
US6301802B1 (en) | 1990-08-29 | 2001-10-16 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
US6457253B2 (en) | 1990-08-29 | 2002-10-01 | Hitachi, Ltd. | Vacuum processing apparatus |
US6463678B2 (en) | 1990-08-29 | 2002-10-15 | Hitachi, Ltd. | Substrate changing-over mechanism in a vaccum tank |
US6467187B2 (en) | 1990-08-29 | 2002-10-22 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
US6470596B2 (en) | 1990-08-29 | 2002-10-29 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
US6301801B1 (en) | 1990-08-29 | 2001-10-16 | Shigekazu Kato | Vacuum processing apparatus and operating method therefor |
US6112431A (en) * | 1990-08-29 | 2000-09-05 | Hitachi, Ltd. | Vacuum processing and operating method |
US6487794B2 (en) | 1990-08-29 | 2002-12-03 | Hitachi, Ltd. | Substrate changing-over mechanism in vacuum tank |
US6487791B2 (en) | 1990-08-29 | 2002-12-03 | Hitachi, Ltd. | Vacuum processing apparatus |
US6490810B2 (en) | 1990-08-29 | 2002-12-10 | Hitachi, Ltd. | Vacuum processing apparatus |
US6505415B2 (en) | 1990-08-29 | 2003-01-14 | Hitachi, Ltd. | Vacuum processing apparatus |
US6625899B2 (en) | 1990-08-29 | 2003-09-30 | Hitachi, Ltd. | Vacuum processing apparatus |
US6070341A (en) * | 1990-08-29 | 2000-06-06 | Hitachi, Ltd. | Vacuum processing and operating method with wafers, substrates and/or semiconductors |
US6886272B2 (en) | 1990-08-29 | 2005-05-03 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
US7089680B1 (en) | 1990-08-29 | 2006-08-15 | Hitachi, Ltd. | Vacuum processing apparatus and operating method therefor |
US5145146A (en) * | 1991-04-15 | 1992-09-08 | Yazaki Corporation | Nozzle support arrangement in electromagnetic valve |
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