JPS646539U - - Google Patents
Info
- Publication number
- JPS646539U JPS646539U JP10101087U JP10101087U JPS646539U JP S646539 U JPS646539 U JP S646539U JP 10101087 U JP10101087 U JP 10101087U JP 10101087 U JP10101087 U JP 10101087U JP S646539 U JPS646539 U JP S646539U
- Authority
- JP
- Japan
- Prior art keywords
- pressure
- pressure receiving
- substrate
- receiving chamber
- detection device
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000001514 detection method Methods 0.000 claims description 3
- 239000000758 substrate Substances 0.000 claims description 3
- 239000012530 fluid Substances 0.000 claims description 2
- 230000008014 freezing Effects 0.000 claims 1
- 238000007710 freezing Methods 0.000 claims 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims 1
Landscapes
- Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10101087U JPH044990Y2 (ja�@�@) | 1987-07-02 | 1987-07-02 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP10101087U JPH044990Y2 (ja�@�@) | 1987-07-02 | 1987-07-02 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS646539U true JPS646539U (ja�@�@) | 1989-01-13 |
| JPH044990Y2 JPH044990Y2 (ja�@�@) | 1992-02-13 |
Family
ID=31329612
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP10101087U Expired JPH044990Y2 (ja�@�@) | 1987-07-02 | 1987-07-02 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH044990Y2 (ja�@�@) |
-
1987
- 1987-07-02 JP JP10101087U patent/JPH044990Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH044990Y2 (ja�@�@) | 1992-02-13 |