JPS646539U - - Google Patents

Info

Publication number
JPS646539U
JPS646539U JP10101087U JP10101087U JPS646539U JP S646539 U JPS646539 U JP S646539U JP 10101087 U JP10101087 U JP 10101087U JP 10101087 U JP10101087 U JP 10101087U JP S646539 U JPS646539 U JP S646539U
Authority
JP
Japan
Prior art keywords
pressure
pressure receiving
substrate
receiving chamber
detection device
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP10101087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH044990Y2 (enrdf_load_stackoverflow
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP10101087U priority Critical patent/JPH044990Y2/ja
Publication of JPS646539U publication Critical patent/JPS646539U/ja
Application granted granted Critical
Publication of JPH044990Y2 publication Critical patent/JPH044990Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Testing Of Devices, Machine Parts, Or Other Structures Thereof (AREA)
JP10101087U 1987-07-02 1987-07-02 Expired JPH044990Y2 (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP10101087U JPH044990Y2 (enrdf_load_stackoverflow) 1987-07-02 1987-07-02

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP10101087U JPH044990Y2 (enrdf_load_stackoverflow) 1987-07-02 1987-07-02

Publications (2)

Publication Number Publication Date
JPS646539U true JPS646539U (enrdf_load_stackoverflow) 1989-01-13
JPH044990Y2 JPH044990Y2 (enrdf_load_stackoverflow) 1992-02-13

Family

ID=31329612

Family Applications (1)

Application Number Title Priority Date Filing Date
JP10101087U Expired JPH044990Y2 (enrdf_load_stackoverflow) 1987-07-02 1987-07-02

Country Status (1)

Country Link
JP (1) JPH044990Y2 (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH044990Y2 (enrdf_load_stackoverflow) 1992-02-13

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