JPS6463919A - Light transmitter - Google Patents

Light transmitter

Info

Publication number
JPS6463919A
JPS6463919A JP62220401A JP22040187A JPS6463919A JP S6463919 A JPS6463919 A JP S6463919A JP 62220401 A JP62220401 A JP 62220401A JP 22040187 A JP22040187 A JP 22040187A JP S6463919 A JPS6463919 A JP S6463919A
Authority
JP
Japan
Prior art keywords
mirror
optical axis
light beam
detection
reflecting surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP62220401A
Other languages
Japanese (ja)
Other versions
JP2606227B2 (en
Inventor
Saburo Kamiya
Shoichi Tanimoto
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
Original Assignee
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Nikon Corp filed Critical Nikon Corp
Priority to JP62220401A priority Critical patent/JP2606227B2/en
Publication of JPS6463919A publication Critical patent/JPS6463919A/en
Application granted granted Critical
Publication of JP2606227B2 publication Critical patent/JP2606227B2/en
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G03—PHOTOGRAPHY; CINEMATOGRAPHY; ANALOGOUS TECHNIQUES USING WAVES OTHER THAN OPTICAL WAVES; ELECTROGRAPHY; HOLOGRAPHY
    • G03F—PHOTOMECHANICAL PRODUCTION OF TEXTURED OR PATTERNED SURFACES, e.g. FOR PRINTING, FOR PROCESSING OF SEMICONDUCTOR DEVICES; MATERIALS THEREFOR; ORIGINALS THEREFOR; APPARATUS SPECIALLY ADAPTED THEREFOR
    • G03F7/00—Photomechanical, e.g. photolithographic, production of textured or patterned surfaces, e.g. printing surfaces; Materials therefor, e.g. comprising photoresists; Apparatus specially adapted therefor
    • G03F7/70—Microphotolithographic exposure; Apparatus therefor
    • G03F7/70058—Mask illumination systems

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Exposure Of Semiconductors, Excluding Electron Or Ion Beam Exposure (AREA)
  • Lasers (AREA)
  • Mechanical Optical Scanning Systems (AREA)
  • Mechanical Light Control Or Optical Switches (AREA)
  • Exposure And Positioning Against Photoresist Photosensitive Materials (AREA)

Abstract

PURPOSE:To maintain the best state as a light transmission system at all times by controlling and adjusting the angle of each reflecting mirror according to the detection result of a four-division photodetector which detects the optical axis or spot position of an adjusting light beam reflected by the reflecting mirror. CONSTITUTION:When the reflecting surface of a 1st mirror 12 slants from a reference slanting position, the beam spot shifts in position on the detection surface of the 4-division photodetector 28 and detection outputs of its four division detector do not coincide with one another. Those output detection signals are inputted to a control driving device 34. The control driving device 34 finds the slanting direction of the optical axis of the adjusting light beam L or the slanting direction of the reflecting surface of a 1st mirror 12 from the four detection signals from the 4-division photodetector 28 and drives the 1st mirror 12 so that the reflecting surface slants to the reference position. Consequently, the optical axis of the adjusting light beam L reflected by the 1st mirror 12 is held invariably; constant and 2nd and 3rd mirrors 14 and 16 are also controlled similarly.
JP62220401A 1987-09-04 1987-09-04 Light transmission device Expired - Fee Related JP2606227B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62220401A JP2606227B2 (en) 1987-09-04 1987-09-04 Light transmission device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62220401A JP2606227B2 (en) 1987-09-04 1987-09-04 Light transmission device

Publications (2)

Publication Number Publication Date
JPS6463919A true JPS6463919A (en) 1989-03-09
JP2606227B2 JP2606227B2 (en) 1997-04-30

Family

ID=16750537

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62220401A Expired - Fee Related JP2606227B2 (en) 1987-09-04 1987-09-04 Light transmission device

Country Status (1)

Country Link
JP (1) JP2606227B2 (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206497A (en) * 1992-04-06 1993-04-27 At&T Bell Laboratories Free-space optical switching apparatus

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE102011115944B4 (en) * 2011-10-08 2013-06-06 Jenlab Gmbh Flexible nonlinear laser scanning microscope for non-invasive three-dimensional detection
US11079564B2 (en) 2017-07-20 2021-08-03 Cymer, Llc Methods and apparatuses for aligning and diagnosing a laser beam

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200219A (en) * 1984-02-24 1985-10-09 カール・ツアイス‐スチフツング Apparatus for compensating for displacement of laser beam introduced through polarization optical system
JPS60200220A (en) * 1984-02-24 1985-10-09 カール・ツアイス‐スチフツング Position corrector for laser beam introduced through a link optical system

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS60200219A (en) * 1984-02-24 1985-10-09 カール・ツアイス‐スチフツング Apparatus for compensating for displacement of laser beam introduced through polarization optical system
JPS60200220A (en) * 1984-02-24 1985-10-09 カール・ツアイス‐スチフツング Position corrector for laser beam introduced through a link optical system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5206497A (en) * 1992-04-06 1993-04-27 At&T Bell Laboratories Free-space optical switching apparatus

Also Published As

Publication number Publication date
JP2606227B2 (en) 1997-04-30

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees