JPS6460781A - Cryopump for spatter - Google Patents

Cryopump for spatter

Info

Publication number
JPS6460781A
JPS6460781A JP21648587A JP21648587A JPS6460781A JP S6460781 A JPS6460781 A JP S6460781A JP 21648587 A JP21648587 A JP 21648587A JP 21648587 A JP21648587 A JP 21648587A JP S6460781 A JPS6460781 A JP S6460781A
Authority
JP
Japan
Prior art keywords
carrier tray
cryopanel
argon
cooled
less
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP21648587A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0511223B2 (enExample
Inventor
Hidetoshi Morimoto
Shinji Furuya
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Ulvac Cryogenics Inc
Original Assignee
Ulvac Cryogenics Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ulvac Cryogenics Inc filed Critical Ulvac Cryogenics Inc
Priority to JP21648587A priority Critical patent/JPS6460781A/ja
Publication of JPS6460781A publication Critical patent/JPS6460781A/ja
Publication of JPH0511223B2 publication Critical patent/JPH0511223B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Compressors, Vaccum Pumps And Other Relevant Systems (AREA)
JP21648587A 1987-09-01 1987-09-01 Cryopump for spatter Granted JPS6460781A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP21648587A JPS6460781A (en) 1987-09-01 1987-09-01 Cryopump for spatter

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP21648587A JPS6460781A (en) 1987-09-01 1987-09-01 Cryopump for spatter

Publications (2)

Publication Number Publication Date
JPS6460781A true JPS6460781A (en) 1989-03-07
JPH0511223B2 JPH0511223B2 (enExample) 1993-02-12

Family

ID=16689168

Family Applications (1)

Application Number Title Priority Date Filing Date
JP21648587A Granted JPS6460781A (en) 1987-09-01 1987-09-01 Cryopump for spatter

Country Status (1)

Country Link
JP (1) JPS6460781A (enExample)

Also Published As

Publication number Publication date
JPH0511223B2 (enExample) 1993-02-12

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