JPS6458822A - Multi-stage parallel spring mechanism - Google Patents

Multi-stage parallel spring mechanism

Info

Publication number
JPS6458822A
JPS6458822A JP62214693A JP21469387A JPS6458822A JP S6458822 A JPS6458822 A JP S6458822A JP 62214693 A JP62214693 A JP 62214693A JP 21469387 A JP21469387 A JP 21469387A JP S6458822 A JPS6458822 A JP S6458822A
Authority
JP
Japan
Prior art keywords
base portion
moving stage
spring mechanisms
parallel
unit spring
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62214693A
Other languages
Japanese (ja)
Inventor
Nobuhiro Tsuda
Mitsuru Tanaka
Mitsuo Sawazaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Nikon Corp
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Nikon Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Nikon Corp filed Critical Agency of Industrial Science and Technology
Priority to JP62214693A priority Critical patent/JPS6458822A/en
Publication of JPS6458822A publication Critical patent/JPS6458822A/en
Pending legal-status Critical Current

Links

Classifications

    • F—MECHANICAL ENGINEERING; LIGHTING; HEATING; WEAPONS; BLASTING
    • F16—ENGINEERING ELEMENTS AND UNITS; GENERAL MEASURES FOR PRODUCING AND MAINTAINING EFFECTIVE FUNCTIONING OF MACHINES OR INSTALLATIONS; THERMAL INSULATION IN GENERAL
    • F16F—SPRINGS; SHOCK-ABSORBERS; MEANS FOR DAMPING VIBRATION
    • F16F1/00—Springs

Abstract

PURPOSE:To increase a maximum quantity of displacement without reducing a resolution by arranging integral slit parallel spring mechanisms in parallel alternately upside down, and connecting a moving stage with a base portion of the adjacent spring mechanisms. CONSTITUTION:A multi-stage parallel spring mechanism is comprised of plural integral slit parallel unit spring mechanisms arranged in a transverse direction thereof. The adjacent ones of the unit spring mechanisms are arranged in an upside-down relationship to each other, and a moving stage 2 of one of the adjacent unit spring mechanisms is connected to a base portion 1 of the other unit spring mechanism. Each of the unit spring mechanisms of the odd numbers includes the base portion 1 on the bottom side, the moving stage 2 on the top side, and parallel springs 3 on the opposite sides, while each of the unit spring mechanisms of the even numbers includes the base portion 1 on the top side, the moving stage 2 on the bottom side, and the parallel springs 3 on the opposite sides. Each unit spring mechanism further includes an auxiliary connecting portion 4 connecting the base portion 1 with the moving stage 2, and a pair of projections 5 projecting inwardly from the base portion 1 and the moving stage 2.
JP62214693A 1987-08-28 1987-08-28 Multi-stage parallel spring mechanism Pending JPS6458822A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62214693A JPS6458822A (en) 1987-08-28 1987-08-28 Multi-stage parallel spring mechanism

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62214693A JPS6458822A (en) 1987-08-28 1987-08-28 Multi-stage parallel spring mechanism

Publications (1)

Publication Number Publication Date
JPS6458822A true JPS6458822A (en) 1989-03-06

Family

ID=16660037

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62214693A Pending JPS6458822A (en) 1987-08-28 1987-08-28 Multi-stage parallel spring mechanism

Country Status (1)

Country Link
JP (1) JPS6458822A (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0434226A (en) * 1990-05-28 1992-02-05 Toshiba Corp Minute displacement device
JP2014502343A (en) * 2010-10-21 2014-01-30 ソルラブス、 インコーポレイテッド Parallelism maintenance device for nanopositioners

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0434226A (en) * 1990-05-28 1992-02-05 Toshiba Corp Minute displacement device
JP2014502343A (en) * 2010-10-21 2014-01-30 ソルラブス、 インコーポレイテッド Parallelism maintenance device for nanopositioners

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