JPS6457636U - - Google Patents
Info
- Publication number
- JPS6457636U JPS6457636U JP15239487U JP15239487U JPS6457636U JP S6457636 U JPS6457636 U JP S6457636U JP 15239487 U JP15239487 U JP 15239487U JP 15239487 U JP15239487 U JP 15239487U JP S6457636 U JPS6457636 U JP S6457636U
- Authority
- JP
- Japan
- Prior art keywords
- oxide film
- silicon oxide
- substrate
- head part
- deposition apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims 3
- 229910052814 silicon oxide Inorganic materials 0.000 claims 3
- 230000008021 deposition Effects 0.000 claims 2
- 239000000758 substrate Substances 0.000 claims 2
- 239000007789 gas Substances 0.000 claims 1
- 239000012495 reaction gas Substances 0.000 claims 1
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15239487U JPS6457636U (hr) | 1987-10-05 | 1987-10-05 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP15239487U JPS6457636U (hr) | 1987-10-05 | 1987-10-05 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6457636U true JPS6457636U (hr) | 1989-04-10 |
Family
ID=31427278
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP15239487U Pending JPS6457636U (hr) | 1987-10-05 | 1987-10-05 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6457636U (hr) |
-
1987
- 1987-10-05 JP JP15239487U patent/JPS6457636U/ja active Pending