JPS645445U - - Google Patents
Info
- Publication number
- JPS645445U JPS645445U JP9984087U JP9984087U JPS645445U JP S645445 U JPS645445 U JP S645445U JP 9984087 U JP9984087 U JP 9984087U JP 9984087 U JP9984087 U JP 9984087U JP S645445 U JPS645445 U JP S645445U
- Authority
- JP
- Japan
- Prior art keywords
- pattern
- suction
- semiconductor wafer
- periphery
- etching
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005530 etching Methods 0.000 claims description 5
- 239000004065 semiconductor Substances 0.000 claims description 3
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9984087U JPS645445U (zh) | 1987-06-29 | 1987-06-29 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9984087U JPS645445U (zh) | 1987-06-29 | 1987-06-29 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS645445U true JPS645445U (zh) | 1989-01-12 |
Family
ID=31327372
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9984087U Pending JPS645445U (zh) | 1987-06-29 | 1987-06-29 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS645445U (zh) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316803U (zh) * | 1989-06-30 | 1991-02-20 |
-
1987
- 1987-06-29 JP JP9984087U patent/JPS645445U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0316803U (zh) * | 1989-06-30 | 1991-02-20 |