JPS6453772U - - Google Patents
Info
- Publication number
- JPS6453772U JPS6453772U JP14674387U JP14674387U JPS6453772U JP S6453772 U JPS6453772 U JP S6453772U JP 14674387 U JP14674387 U JP 14674387U JP 14674387 U JP14674387 U JP 14674387U JP S6453772 U JPS6453772 U JP S6453772U
- Authority
- JP
- Japan
- Prior art keywords
- molecular beam
- source cell
- gas
- crystal growth
- growth apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14674387U JPS6453772U (en:Method) | 1987-09-25 | 1987-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14674387U JPS6453772U (en:Method) | 1987-09-25 | 1987-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6453772U true JPS6453772U (en:Method) | 1989-04-03 |
Family
ID=31416518
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14674387U Pending JPS6453772U (en:Method) | 1987-09-25 | 1987-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6453772U (en:Method) |
-
1987
- 1987-09-25 JP JP14674387U patent/JPS6453772U/ja active Pending
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