JPS6453754U - - Google Patents

Info

Publication number
JPS6453754U
JPS6453754U JP15060287U JP15060287U JPS6453754U JP S6453754 U JPS6453754 U JP S6453754U JP 15060287 U JP15060287 U JP 15060287U JP 15060287 U JP15060287 U JP 15060287U JP S6453754 U JPS6453754 U JP S6453754U
Authority
JP
Japan
Prior art keywords
substrate
holding mechanism
circular opening
sputtering apparatus
annular holder
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP15060287U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0343233Y2 (US20090163788A1-20090625-C00002.png
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987150602U priority Critical patent/JPH0343233Y2/ja
Publication of JPS6453754U publication Critical patent/JPS6453754U/ja
Application granted granted Critical
Publication of JPH0343233Y2 publication Critical patent/JPH0343233Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP1987150602U 1987-09-30 1987-09-30 Expired JPH0343233Y2 (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987150602U JPH0343233Y2 (US20090163788A1-20090625-C00002.png) 1987-09-30 1987-09-30

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987150602U JPH0343233Y2 (US20090163788A1-20090625-C00002.png) 1987-09-30 1987-09-30

Publications (2)

Publication Number Publication Date
JPS6453754U true JPS6453754U (US20090163788A1-20090625-C00002.png) 1989-04-03
JPH0343233Y2 JPH0343233Y2 (US20090163788A1-20090625-C00002.png) 1991-09-10

Family

ID=31423894

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987150602U Expired JPH0343233Y2 (US20090163788A1-20090625-C00002.png) 1987-09-30 1987-09-30

Country Status (1)

Country Link
JP (1) JPH0343233Y2 (US20090163788A1-20090625-C00002.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03191059A (ja) * 1989-12-20 1991-08-21 Matsushita Electric Ind Co Ltd スパッタリング装置
JPH0452275A (ja) * 1990-06-20 1992-02-20 Hitachi Ltd スパツタリング装置

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56598U (US20090163788A1-20090625-C00002.png) * 1979-06-16 1981-01-06

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56598U (US20090163788A1-20090625-C00002.png) * 1979-06-16 1981-01-06

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH03191059A (ja) * 1989-12-20 1991-08-21 Matsushita Electric Ind Co Ltd スパッタリング装置
JPH0452275A (ja) * 1990-06-20 1992-02-20 Hitachi Ltd スパツタリング装置

Also Published As

Publication number Publication date
JPH0343233Y2 (US20090163788A1-20090625-C00002.png) 1991-09-10

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