JPS6453750U - - Google Patents
Info
- Publication number
- JPS6453750U JPS6453750U JP14787687U JP14787687U JPS6453750U JP S6453750 U JPS6453750 U JP S6453750U JP 14787687 U JP14787687 U JP 14787687U JP 14787687 U JP14787687 U JP 14787687U JP S6453750 U JPS6453750 U JP S6453750U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- electron beam
- evaporation source
- beam evaporation
- vapor deposition
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000005566 electron beam evaporation Methods 0.000 claims description 3
- 238000007740 vapor deposition Methods 0.000 claims description 2
- 238000007738 vacuum evaporation Methods 0.000 claims 1
- 230000008020 evaporation Effects 0.000 description 2
- 238000001704 evaporation Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 1
- 238000010894 electron beam technology Methods 0.000 description 1
- 238000012544 monitoring process Methods 0.000 description 1
Landscapes
- Physical Vapour Deposition (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14787687U JPH0527489Y2 (me) | 1987-09-28 | 1987-09-28 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14787687U JPH0527489Y2 (me) | 1987-09-28 | 1987-09-28 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6453750U true JPS6453750U (me) | 1989-04-03 |
| JPH0527489Y2 JPH0527489Y2 (me) | 1993-07-13 |
Family
ID=31418687
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14787687U Expired - Lifetime JPH0527489Y2 (me) | 1987-09-28 | 1987-09-28 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0527489Y2 (me) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012046795A1 (ja) * | 2010-10-08 | 2012-04-12 | 株式会社カネカ | 蒸着装置、薄膜の成膜方法、並びに、有機ｅｌ装置の製造方法 |
-
1987
- 1987-09-28 JP JP14787687U patent/JPH0527489Y2/ja not_active Expired - Lifetime
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2012046795A1 (ja) * | 2010-10-08 | 2012-04-12 | 株式会社カネカ | 蒸着装置、薄膜の成膜方法、並びに、有機ｅｌ装置の製造方法 |
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0527489Y2 (me) | 1993-07-13 |