JPS6452699U - - Google Patents

Info

Publication number
JPS6452699U
JPS6452699U JP14719587U JP14719587U JPS6452699U JP S6452699 U JPS6452699 U JP S6452699U JP 14719587 U JP14719587 U JP 14719587U JP 14719587 U JP14719587 U JP 14719587U JP S6452699 U JPS6452699 U JP S6452699U
Authority
JP
Japan
Prior art keywords
substrate
pedestal
upper plate
plate
fixed
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14719587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14719587U priority Critical patent/JPS6452699U/ja
Publication of JPS6452699U publication Critical patent/JPS6452699U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Perforating, Stamping-Out Or Severing By Means Other Than Cutting (AREA)
JP14719587U 1987-09-26 1987-09-26 Pending JPS6452699U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14719587U JPS6452699U (enrdf_load_stackoverflow) 1987-09-26 1987-09-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14719587U JPS6452699U (enrdf_load_stackoverflow) 1987-09-26 1987-09-26

Publications (1)

Publication Number Publication Date
JPS6452699U true JPS6452699U (enrdf_load_stackoverflow) 1989-03-31

Family

ID=31417375

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14719587U Pending JPS6452699U (enrdf_load_stackoverflow) 1987-09-26 1987-09-26

Country Status (1)

Country Link
JP (1) JPS6452699U (enrdf_load_stackoverflow)

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