JPS6452647U - - Google Patents
Info
- Publication number
- JPS6452647U JPS6452647U JP1987148278U JP14827887U JPS6452647U JP S6452647 U JPS6452647 U JP S6452647U JP 1987148278 U JP1987148278 U JP 1987148278U JP 14827887 U JP14827887 U JP 14827887U JP S6452647 U JPS6452647 U JP S6452647U
- Authority
- JP
- Japan
- Prior art keywords
- attached
- arm
- polishing machine
- machine
- polisher
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000005498 polishing Methods 0.000 claims description 5
- 150000001875 compounds Chemical class 0.000 claims description 2
- 239000004065 semiconductor Substances 0.000 claims description 2
- 235000012431 wafers Nutrition 0.000 claims 1
- 238000009423 ventilation Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987148278U JPH0650127Y2 (ja) | 1987-09-30 | 1987-09-30 | 化合物半導体ウエハ用研磨機 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1987148278U JPH0650127Y2 (ja) | 1987-09-30 | 1987-09-30 | 化合物半導体ウエハ用研磨機 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6452647U true JPS6452647U (fi) | 1989-03-31 |
| JPH0650127Y2 JPH0650127Y2 (ja) | 1994-12-21 |
Family
ID=31419451
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1987148278U Expired - Lifetime JPH0650127Y2 (ja) | 1987-09-30 | 1987-09-30 | 化合物半導体ウエハ用研磨機 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0650127Y2 (fi) |
-
1987
- 1987-09-30 JP JP1987148278U patent/JPH0650127Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0650127Y2 (ja) | 1994-12-21 |