JPS6452574U - - Google Patents

Info

Publication number
JPS6452574U
JPS6452574U JP14676887U JP14676887U JPS6452574U JP S6452574 U JPS6452574 U JP S6452574U JP 14676887 U JP14676887 U JP 14676887U JP 14676887 U JP14676887 U JP 14676887U JP S6452574 U JPS6452574 U JP S6452574U
Authority
JP
Japan
Prior art keywords
region
film
movable partition
liquid surface
partition wall
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14676887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14676887U priority Critical patent/JPS6452574U/ja
Publication of JPS6452574U publication Critical patent/JPS6452574U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14676887U 1987-09-25 1987-09-25 Pending JPS6452574U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14676887U JPS6452574U (enrdf_load_stackoverflow) 1987-09-25 1987-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14676887U JPS6452574U (enrdf_load_stackoverflow) 1987-09-25 1987-09-25

Publications (1)

Publication Number Publication Date
JPS6452574U true JPS6452574U (enrdf_load_stackoverflow) 1989-03-31

Family

ID=31416563

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14676887U Pending JPS6452574U (enrdf_load_stackoverflow) 1987-09-25 1987-09-25

Country Status (1)

Country Link
JP (1) JPS6452574U (enrdf_load_stackoverflow)

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