JPS6452574U - - Google Patents
Info
- Publication number
- JPS6452574U JPS6452574U JP14676887U JP14676887U JPS6452574U JP S6452574 U JPS6452574 U JP S6452574U JP 14676887 U JP14676887 U JP 14676887U JP 14676887 U JP14676887 U JP 14676887U JP S6452574 U JPS6452574 U JP S6452574U
- Authority
- JP
- Japan
- Prior art keywords
- region
- film
- movable partition
- liquid surface
- partition wall
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000005192 partition Methods 0.000 claims 4
- 239000007788 liquid Substances 0.000 claims 2
- 239000000126 substance Substances 0.000 claims 2
- 238000004519 manufacturing process Methods 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Coating Apparatus (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14676887U JPS6452574U (cs) | 1987-09-25 | 1987-09-25 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14676887U JPS6452574U (cs) | 1987-09-25 | 1987-09-25 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6452574U true JPS6452574U (cs) | 1989-03-31 |
Family
ID=31416563
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14676887U Pending JPS6452574U (cs) | 1987-09-25 | 1987-09-25 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6452574U (cs) |
-
1987
- 1987-09-25 JP JP14676887U patent/JPS6452574U/ja active Pending