JPS6452099U - - Google Patents
Info
- Publication number
- JPS6452099U JPS6452099U JP14446687U JP14446687U JPS6452099U JP S6452099 U JPS6452099 U JP S6452099U JP 14446687 U JP14446687 U JP 14446687U JP 14446687 U JP14446687 U JP 14446687U JP S6452099 U JPS6452099 U JP S6452099U
- Authority
- JP
- Japan
- Prior art keywords
- sensor
- equipment
- stops functioning
- sensors
- circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004913 activation Effects 0.000 claims 1
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Landscapes
- Physical Deposition Of Substances That Are Components Of Semiconductor Devices (AREA)
- Arrangements For Transmission Of Measured Signals (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14446687U JPS6452099U (de) | 1987-09-24 | 1987-09-24 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14446687U JPS6452099U (de) | 1987-09-24 | 1987-09-24 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6452099U true JPS6452099U (de) | 1989-03-30 |
Family
ID=31412207
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14446687U Pending JPS6452099U (de) | 1987-09-24 | 1987-09-24 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6452099U (de) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002288781A (ja) * | 2001-03-27 | 2002-10-04 | Toshiba Corp | センサ異常検出方法及びセンサ異常検出装置 |
-
1987
- 1987-09-24 JP JP14446687U patent/JPS6452099U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002288781A (ja) * | 2001-03-27 | 2002-10-04 | Toshiba Corp | センサ異常検出方法及びセンサ異常検出装置 |