JPS6451844U - - Google Patents

Info

Publication number
JPS6451844U
JPS6451844U JP14791487U JP14791487U JPS6451844U JP S6451844 U JPS6451844 U JP S6451844U JP 14791487 U JP14791487 U JP 14791487U JP 14791487 U JP14791487 U JP 14791487U JP S6451844 U JPS6451844 U JP S6451844U
Authority
JP
Japan
Prior art keywords
substrate
silicon
sensor chip
fixing portion
fixing part
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14791487U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14791487U priority Critical patent/JPS6451844U/ja
Publication of JPS6451844U publication Critical patent/JPS6451844U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
JP14791487U 1987-09-28 1987-09-28 Pending JPS6451844U (US08124317-20120228-C00060.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14791487U JPS6451844U (US08124317-20120228-C00060.png) 1987-09-28 1987-09-28

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14791487U JPS6451844U (US08124317-20120228-C00060.png) 1987-09-28 1987-09-28

Publications (1)

Publication Number Publication Date
JPS6451844U true JPS6451844U (US08124317-20120228-C00060.png) 1989-03-30

Family

ID=31418762

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14791487U Pending JPS6451844U (US08124317-20120228-C00060.png) 1987-09-28 1987-09-28

Country Status (1)

Country Link
JP (1) JPS6451844U (US08124317-20120228-C00060.png)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009041465A1 (ja) * 2007-09-25 2009-04-02 Alps Electric Co., Ltd. 半導体圧力センサ

Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57190242A (en) * 1981-05-20 1982-11-22 Hitachi Ltd Pressure sensor

Patent Citations (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57190242A (en) * 1981-05-20 1982-11-22 Hitachi Ltd Pressure sensor

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009041465A1 (ja) * 2007-09-25 2009-04-02 Alps Electric Co., Ltd. 半導体圧力センサ

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