JPS645137U - - Google Patents

Info

Publication number
JPS645137U
JPS645137U JP9985787U JP9985787U JPS645137U JP S645137 U JPS645137 U JP S645137U JP 9985787 U JP9985787 U JP 9985787U JP 9985787 U JP9985787 U JP 9985787U JP S645137 U JPS645137 U JP S645137U
Authority
JP
Japan
Prior art keywords
sensor chip
substrate
semiconductor
sensor
forming
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9985787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9985787U priority Critical patent/JPS645137U/ja
Publication of JPS645137U publication Critical patent/JPS645137U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)
JP9985787U 1987-06-29 1987-06-29 Pending JPS645137U (US20090163788A1-20090625-C00002.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9985787U JPS645137U (US20090163788A1-20090625-C00002.png) 1987-06-29 1987-06-29

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9985787U JPS645137U (US20090163788A1-20090625-C00002.png) 1987-06-29 1987-06-29

Publications (1)

Publication Number Publication Date
JPS645137U true JPS645137U (US20090163788A1-20090625-C00002.png) 1989-01-12

Family

ID=31327405

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9985787U Pending JPS645137U (US20090163788A1-20090625-C00002.png) 1987-06-29 1987-06-29

Country Status (1)

Country Link
JP (1) JPS645137U (US20090163788A1-20090625-C00002.png)

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