JPS645115U - - Google Patents

Info

Publication number
JPS645115U
JPS645115U JP9916887U JP9916887U JPS645115U JP S645115 U JPS645115 U JP S645115U JP 9916887 U JP9916887 U JP 9916887U JP 9916887 U JP9916887 U JP 9916887U JP S645115 U JPS645115 U JP S645115U
Authority
JP
Japan
Prior art keywords
piezoelectric
bimorph
quantity sensor
mechanical quantity
diaphragm
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP9916887U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP9916887U priority Critical patent/JPS645115U/ja
Publication of JPS645115U publication Critical patent/JPS645115U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Transmission And Conversion Of Sensor Element Output (AREA)
JP9916887U 1987-06-26 1987-06-26 Pending JPS645115U (US07655688-20100202-C00086.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP9916887U JPS645115U (US07655688-20100202-C00086.png) 1987-06-26 1987-06-26

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP9916887U JPS645115U (US07655688-20100202-C00086.png) 1987-06-26 1987-06-26

Publications (1)

Publication Number Publication Date
JPS645115U true JPS645115U (US07655688-20100202-C00086.png) 1989-01-12

Family

ID=31326074

Family Applications (1)

Application Number Title Priority Date Filing Date
JP9916887U Pending JPS645115U (US07655688-20100202-C00086.png) 1987-06-26 1987-06-26

Country Status (1)

Country Link
JP (1) JPS645115U (US07655688-20100202-C00086.png)

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