JPS6450454U - - Google Patents
Info
- Publication number
- JPS6450454U JPS6450454U JP14586387U JP14586387U JPS6450454U JP S6450454 U JPS6450454 U JP S6450454U JP 14586387 U JP14586387 U JP 14586387U JP 14586387 U JP14586387 U JP 14586387U JP S6450454 U JPS6450454 U JP S6450454U
- Authority
- JP
- Japan
- Prior art keywords
- generating section
- strain
- convex side
- output
- pressure
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000004065 semiconductor Substances 0.000 claims description 3
- 229910052710 silicon Inorganic materials 0.000 claims description 2
- 239000010703 silicon Substances 0.000 claims description 2
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims 1
- 238000005259 measurement Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 2
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
Landscapes
- Measuring Fluid Pressure (AREA)
- Pressure Sensors (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987145863U JPH0744027Y2 (ja) | 1987-09-24 | 1987-09-24 | 半導体圧力センサ |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP1987145863U JPH0744027Y2 (ja) | 1987-09-24 | 1987-09-24 | 半導体圧力センサ |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6450454U true JPS6450454U (US07534539-20090519-C00280.png) | 1989-03-29 |
JPH0744027Y2 JPH0744027Y2 (ja) | 1995-10-09 |
Family
ID=31414826
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP1987145863U Expired - Lifetime JPH0744027Y2 (ja) | 1987-09-24 | 1987-09-24 | 半導体圧力センサ |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPH0744027Y2 (US07534539-20090519-C00280.png) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012508387A (ja) * | 2008-11-11 | 2012-04-05 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 圧力センサ |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5515650A (en) * | 1978-07-19 | 1980-02-02 | Sankei Sangyo Kk | Oil treating apparatus |
-
1987
- 1987-09-24 JP JP1987145863U patent/JPH0744027Y2/ja not_active Expired - Lifetime
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5515650A (en) * | 1978-07-19 | 1980-02-02 | Sankei Sangyo Kk | Oil treating apparatus |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2012508387A (ja) * | 2008-11-11 | 2012-04-05 | ローベルト ボツシユ ゲゼルシヤフト ミツト ベシユレンクテル ハフツング | 圧力センサ |
Also Published As
Publication number | Publication date |
---|---|
JPH0744027Y2 (ja) | 1995-10-09 |