JPS6450437A - Vacuum transfer apparatus - Google Patents
Vacuum transfer apparatusInfo
- Publication number
- JPS6450437A JPS6450437A JP20793687A JP20793687A JPS6450437A JP S6450437 A JPS6450437 A JP S6450437A JP 20793687 A JP20793687 A JP 20793687A JP 20793687 A JP20793687 A JP 20793687A JP S6450437 A JPS6450437 A JP S6450437A
- Authority
- JP
- Japan
- Prior art keywords
- roller
- single crystal
- steel belt
- partitioning wall
- crystal wafer
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
Landscapes
- Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
- Manipulator (AREA)
Abstract
PURPOSE:To prevent the contamination of the surface of a single crystal wafer, by fixing and projecting supporting pins for the single crystal wafer from the surface of a steel belt, which is wound around a roller, and driving and rotating the roller through magnetic couplings from the outside of a vacuum partitioning wall. CONSTITUTION:A path (a) in a vacuum state is partitioned and formed with a cylindrical partitioning wall 1. A roller 3 is laterally mounted on a shaft at both right and left opening parts of the partitioning wall 1 through a mounting stage 2. A stainless steel belt 5 is wound around the roller 3. The rotation of a motor is transmitted to a power transmitting mechanism to the roller 3 through magnetic couplings 7, which are arranged at the inside and the outside of the partitioning wall 1 so as to face each other. The steel belt is turned in an endless mode. A plurality of supporting pins 11 as one set, which support a single crystal wafer 12, are fixed on the steel belt 5. Therefore, the outer edge of the single crystal wafer 12 is supported with the supporting pins 11. Then, the wafer is conveyed in an approximately noncontact state. Thus, the wafer can be safely conveyed in the vacuum state without the effects of impurities, oxygen and the like.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20793687A JPS6450437A (en) | 1987-08-20 | 1987-08-20 | Vacuum transfer apparatus |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP20793687A JPS6450437A (en) | 1987-08-20 | 1987-08-20 | Vacuum transfer apparatus |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6450437A true JPS6450437A (en) | 1989-02-27 |
Family
ID=16547992
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP20793687A Pending JPS6450437A (en) | 1987-08-20 | 1987-08-20 | Vacuum transfer apparatus |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6450437A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010118593A (en) * | 2008-11-14 | 2010-05-27 | Intevac Inc | Substrate conveyance processing apparatus and method |
-
1987
- 1987-08-20 JP JP20793687A patent/JPS6450437A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2010118593A (en) * | 2008-11-14 | 2010-05-27 | Intevac Inc | Substrate conveyance processing apparatus and method |
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