JPS6450437A - Vacuum transfer apparatus - Google Patents

Vacuum transfer apparatus

Info

Publication number
JPS6450437A
JPS6450437A JP20793687A JP20793687A JPS6450437A JP S6450437 A JPS6450437 A JP S6450437A JP 20793687 A JP20793687 A JP 20793687A JP 20793687 A JP20793687 A JP 20793687A JP S6450437 A JPS6450437 A JP S6450437A
Authority
JP
Japan
Prior art keywords
roller
single crystal
steel belt
partitioning wall
crystal wafer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP20793687A
Other languages
Japanese (ja)
Inventor
Akiyoshi Yokota
Toshio Sekikawa
Kiyoo Katagiri
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Engineering Co Ltd
Original Assignee
Shin Etsu Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Engineering Co Ltd filed Critical Shin Etsu Engineering Co Ltd
Priority to JP20793687A priority Critical patent/JPS6450437A/en
Publication of JPS6450437A publication Critical patent/JPS6450437A/en
Pending legal-status Critical Current

Links

Landscapes

  • Container, Conveyance, Adherence, Positioning, Of Wafer (AREA)
  • Manipulator (AREA)

Abstract

PURPOSE:To prevent the contamination of the surface of a single crystal wafer, by fixing and projecting supporting pins for the single crystal wafer from the surface of a steel belt, which is wound around a roller, and driving and rotating the roller through magnetic couplings from the outside of a vacuum partitioning wall. CONSTITUTION:A path (a) in a vacuum state is partitioned and formed with a cylindrical partitioning wall 1. A roller 3 is laterally mounted on a shaft at both right and left opening parts of the partitioning wall 1 through a mounting stage 2. A stainless steel belt 5 is wound around the roller 3. The rotation of a motor is transmitted to a power transmitting mechanism to the roller 3 through magnetic couplings 7, which are arranged at the inside and the outside of the partitioning wall 1 so as to face each other. The steel belt is turned in an endless mode. A plurality of supporting pins 11 as one set, which support a single crystal wafer 12, are fixed on the steel belt 5. Therefore, the outer edge of the single crystal wafer 12 is supported with the supporting pins 11. Then, the wafer is conveyed in an approximately noncontact state. Thus, the wafer can be safely conveyed in the vacuum state without the effects of impurities, oxygen and the like.
JP20793687A 1987-08-20 1987-08-20 Vacuum transfer apparatus Pending JPS6450437A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP20793687A JPS6450437A (en) 1987-08-20 1987-08-20 Vacuum transfer apparatus

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP20793687A JPS6450437A (en) 1987-08-20 1987-08-20 Vacuum transfer apparatus

Publications (1)

Publication Number Publication Date
JPS6450437A true JPS6450437A (en) 1989-02-27

Family

ID=16547992

Family Applications (1)

Application Number Title Priority Date Filing Date
JP20793687A Pending JPS6450437A (en) 1987-08-20 1987-08-20 Vacuum transfer apparatus

Country Status (1)

Country Link
JP (1) JPS6450437A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010118593A (en) * 2008-11-14 2010-05-27 Intevac Inc Substrate conveyance processing apparatus and method

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2010118593A (en) * 2008-11-14 2010-05-27 Intevac Inc Substrate conveyance processing apparatus and method

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