JPS6450428U - - Google Patents

Info

Publication number
JPS6450428U
JPS6450428U JP14591987U JP14591987U JPS6450428U JP S6450428 U JPS6450428 U JP S6450428U JP 14591987 U JP14591987 U JP 14591987U JP 14591987 U JP14591987 U JP 14591987U JP S6450428 U JPS6450428 U JP S6450428U
Authority
JP
Japan
Prior art keywords
semiconductor wafer
thickness
center
utility
curved surface
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14591987U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14591987U priority Critical patent/JPS6450428U/ja
Publication of JPS6450428U publication Critical patent/JPS6450428U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Materials For Photolithography (AREA)
JP14591987U 1987-09-24 1987-09-24 Pending JPS6450428U (US06582424-20030624-M00016.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14591987U JPS6450428U (US06582424-20030624-M00016.png) 1987-09-24 1987-09-24

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14591987U JPS6450428U (US06582424-20030624-M00016.png) 1987-09-24 1987-09-24

Publications (1)

Publication Number Publication Date
JPS6450428U true JPS6450428U (US06582424-20030624-M00016.png) 1989-03-29

Family

ID=31414933

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14591987U Pending JPS6450428U (US06582424-20030624-M00016.png) 1987-09-24 1987-09-24

Country Status (1)

Country Link
JP (1) JPS6450428U (US06582424-20030624-M00016.png)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0496247A (ja) * 1990-08-03 1992-03-27 Shin Etsu Handotai Co Ltd エピタキシャル成長用半導体ウェーハ、およびその製造方法
WO2003107402A1 (ja) * 2002-06-13 2003-12-24 信越半導体株式会社 半導体ウエーハ

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0496247A (ja) * 1990-08-03 1992-03-27 Shin Etsu Handotai Co Ltd エピタキシャル成長用半導体ウェーハ、およびその製造方法
WO2003107402A1 (ja) * 2002-06-13 2003-12-24 信越半導体株式会社 半導体ウエーハ

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