JPS6450238U - - Google Patents

Info

Publication number
JPS6450238U
JPS6450238U JP14672187U JP14672187U JPS6450238U JP S6450238 U JPS6450238 U JP S6450238U JP 14672187 U JP14672187 U JP 14672187U JP 14672187 U JP14672187 U JP 14672187U JP S6450238 U JPS6450238 U JP S6450238U
Authority
JP
Japan
Prior art keywords
wafer
section
clamp
halves
transfer machine
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14672187U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14672187U priority Critical patent/JPS6450238U/ja
Publication of JPS6450238U publication Critical patent/JPS6450238U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP14672187U 1987-09-25 1987-09-25 Pending JPS6450238U (US08197722-20120612-C00042.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14672187U JPS6450238U (US08197722-20120612-C00042.png) 1987-09-25 1987-09-25

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14672187U JPS6450238U (US08197722-20120612-C00042.png) 1987-09-25 1987-09-25

Publications (1)

Publication Number Publication Date
JPS6450238U true JPS6450238U (US08197722-20120612-C00042.png) 1989-03-28

Family

ID=31416477

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14672187U Pending JPS6450238U (US08197722-20120612-C00042.png) 1987-09-25 1987-09-25

Country Status (1)

Country Link
JP (1) JPS6450238U (US08197722-20120612-C00042.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6062477A (ja) * 1983-09-16 1985-04-10 株式会社日立製作所 ウェハ−カセット搬送ロボット
JPS60229268A (ja) * 1984-04-27 1985-11-14 Nitsukiyou Seisakusho:Kk ビデオデイスク自動再生装置におけるデイスク搬送装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6062477A (ja) * 1983-09-16 1985-04-10 株式会社日立製作所 ウェハ−カセット搬送ロボット
JPS60229268A (ja) * 1984-04-27 1985-11-14 Nitsukiyou Seisakusho:Kk ビデオデイスク自動再生装置におけるデイスク搬送装置

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