JPS6449695U - - Google Patents
Info
- Publication number
- JPS6449695U JPS6449695U JP14392887U JP14392887U JPS6449695U JP S6449695 U JPS6449695 U JP S6449695U JP 14392887 U JP14392887 U JP 14392887U JP 14392887 U JP14392887 U JP 14392887U JP S6449695 U JPS6449695 U JP S6449695U
- Authority
- JP
- Japan
- Prior art keywords
- rotor
- bearing
- concave groove
- center shaft
- molecular pump
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 238000013016 damping Methods 0.000 claims description 3
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14392887U JPH068316Y2 (ja) | 1987-09-22 | 1987-09-22 | 竪形ターボ分子ポンプ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14392887U JPH068316Y2 (ja) | 1987-09-22 | 1987-09-22 | 竪形ターボ分子ポンプ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6449695U true JPS6449695U (fr) | 1989-03-28 |
| JPH068316Y2 JPH068316Y2 (ja) | 1994-03-02 |
Family
ID=31411188
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14392887U Expired - Lifetime JPH068316Y2 (ja) | 1987-09-22 | 1987-09-22 | 竪形ターボ分子ポンプ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH068316Y2 (fr) |
-
1987
- 1987-09-22 JP JP14392887U patent/JPH068316Y2/ja not_active Expired - Lifetime
Also Published As
| Publication number | Publication date |
|---|---|
| JPH068316Y2 (ja) | 1994-03-02 |