JPS6448620U - - Google Patents
Info
- Publication number
- JPS6448620U JPS6448620U JP14400687U JP14400687U JPS6448620U JP S6448620 U JPS6448620 U JP S6448620U JP 14400687 U JP14400687 U JP 14400687U JP 14400687 U JP14400687 U JP 14400687U JP S6448620 U JPS6448620 U JP S6448620U
- Authority
- JP
- Japan
- Prior art keywords
- digital data
- recorder
- input signal
- storage medium
- change
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 2
Landscapes
- Recording Measured Values (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14400687U JPS6448620U (fi) | 1987-09-21 | 1987-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14400687U JPS6448620U (fi) | 1987-09-21 | 1987-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448620U true JPS6448620U (fi) | 1989-03-27 |
Family
ID=31411332
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14400687U Pending JPS6448620U (fi) | 1987-09-21 | 1987-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448620U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009295906A (ja) * | 2008-06-09 | 2009-12-17 | Hitachi Kokusai Electric Inc | 基板処理装置 |
-
1987
- 1987-09-21 JP JP14400687U patent/JPS6448620U/ja active Pending
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2009295906A (ja) * | 2008-06-09 | 2009-12-17 | Hitachi Kokusai Electric Inc | 基板処理装置 |
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