JPS6448361A - Scanning electron microscope - Google Patents
Scanning electron microscopeInfo
- Publication number
- JPS6448361A JPS6448361A JP62204644A JP20464487A JPS6448361A JP S6448361 A JPS6448361 A JP S6448361A JP 62204644 A JP62204644 A JP 62204644A JP 20464487 A JP20464487 A JP 20464487A JP S6448361 A JPS6448361 A JP S6448361A
- Authority
- JP
- Japan
- Prior art keywords
- plate
- superconductor
- sample chamber
- securable
- cooler
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002887 superconductor Substances 0.000 abstract 6
- 229910009203 Y-Ba-Cu-O Inorganic materials 0.000 abstract 3
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 abstract 2
- RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 abstract 1
- 238000001816 cooling Methods 0.000 abstract 1
- 229910052802 copper Inorganic materials 0.000 abstract 1
- 239000010949 copper Substances 0.000 abstract 1
- 230000005292 diamagnetic effect Effects 0.000 abstract 1
- 239000007788 liquid Substances 0.000 abstract 1
- 229910052757 nitrogen Inorganic materials 0.000 abstract 1
Landscapes
- Analysing Materials By The Use Of Radiation (AREA)
Abstract
PURPOSE:To make such a stable secondary electron image that has no fluctua tion even in case of a high magnification observation against an external field noise and an electromagnetic wave securable by installing a Y-Ba-Cu-O supercon ductor plate in a sample chamber, and also installing a cooler so as to cool this superconductor plate. CONSTITUTION:There are provided with a Y-Ba-Cu-O superconductor plate 7 and a cooler 10, and the inside of the sample chamber of a scanning electron microscope is covered with the superconductor plate 7, cooling this plate 7. That is to say, the Y-Ba-Cu-O superconductor plate is installed in the sample chamber exhaust by a high vacuum of the microscope so as to surround a sample stage, and this plate is cooled by liquid nitrogen and a copper plate, whereby the superconductor plate shows its superconductive characteristic, and owing to its complete diamagnetic character, it completely shields a field noise and an electromagnetic wave, so that even at the time of performing a high magnification image observation at low accelerating voltage, a stable secondary electron image is securable.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62204644A JPS6448361A (en) | 1987-08-18 | 1987-08-18 | Scanning electron microscope |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP62204644A JPS6448361A (en) | 1987-08-18 | 1987-08-18 | Scanning electron microscope |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6448361A true JPS6448361A (en) | 1989-02-22 |
Family
ID=16493893
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP62204644A Pending JPS6448361A (en) | 1987-08-18 | 1987-08-18 | Scanning electron microscope |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6448361A (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007001559A (en) * | 2005-05-27 | 2007-01-11 | Combi Corp | Shoulder belt for retaining infant in stroller |
-
1987
- 1987-08-18 JP JP62204644A patent/JPS6448361A/en active Pending
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JP2007001559A (en) * | 2005-05-27 | 2007-01-11 | Combi Corp | Shoulder belt for retaining infant in stroller |
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