JPS6448361A - Scanning electron microscope - Google Patents

Scanning electron microscope

Info

Publication number
JPS6448361A
JPS6448361A JP62204644A JP20464487A JPS6448361A JP S6448361 A JPS6448361 A JP S6448361A JP 62204644 A JP62204644 A JP 62204644A JP 20464487 A JP20464487 A JP 20464487A JP S6448361 A JPS6448361 A JP S6448361A
Authority
JP
Japan
Prior art keywords
plate
superconductor
sample chamber
securable
cooler
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP62204644A
Other languages
Japanese (ja)
Inventor
Yoshihiko Fukuoka
Yasuhiro Hioki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Panasonic Holdings Corp
Original Assignee
Matsushita Electric Industrial Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Matsushita Electric Industrial Co Ltd filed Critical Matsushita Electric Industrial Co Ltd
Priority to JP62204644A priority Critical patent/JPS6448361A/en
Publication of JPS6448361A publication Critical patent/JPS6448361A/en
Pending legal-status Critical Current

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  • Analysing Materials By The Use Of Radiation (AREA)

Abstract

PURPOSE:To make such a stable secondary electron image that has no fluctua tion even in case of a high magnification observation against an external field noise and an electromagnetic wave securable by installing a Y-Ba-Cu-O supercon ductor plate in a sample chamber, and also installing a cooler so as to cool this superconductor plate. CONSTITUTION:There are provided with a Y-Ba-Cu-O superconductor plate 7 and a cooler 10, and the inside of the sample chamber of a scanning electron microscope is covered with the superconductor plate 7, cooling this plate 7. That is to say, the Y-Ba-Cu-O superconductor plate is installed in the sample chamber exhaust by a high vacuum of the microscope so as to surround a sample stage, and this plate is cooled by liquid nitrogen and a copper plate, whereby the superconductor plate shows its superconductive characteristic, and owing to its complete diamagnetic character, it completely shields a field noise and an electromagnetic wave, so that even at the time of performing a high magnification image observation at low accelerating voltage, a stable secondary electron image is securable.
JP62204644A 1987-08-18 1987-08-18 Scanning electron microscope Pending JPS6448361A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP62204644A JPS6448361A (en) 1987-08-18 1987-08-18 Scanning electron microscope

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP62204644A JPS6448361A (en) 1987-08-18 1987-08-18 Scanning electron microscope

Publications (1)

Publication Number Publication Date
JPS6448361A true JPS6448361A (en) 1989-02-22

Family

ID=16493893

Family Applications (1)

Application Number Title Priority Date Filing Date
JP62204644A Pending JPS6448361A (en) 1987-08-18 1987-08-18 Scanning electron microscope

Country Status (1)

Country Link
JP (1) JPS6448361A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007001559A (en) * 2005-05-27 2007-01-11 Combi Corp Shoulder belt for retaining infant in stroller

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2007001559A (en) * 2005-05-27 2007-01-11 Combi Corp Shoulder belt for retaining infant in stroller

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