JPS6448170U - - Google Patents

Info

Publication number
JPS6448170U
JPS6448170U JP14273087U JP14273087U JPS6448170U JP S6448170 U JPS6448170 U JP S6448170U JP 14273087 U JP14273087 U JP 14273087U JP 14273087 U JP14273087 U JP 14273087U JP S6448170 U JPS6448170 U JP S6448170U
Authority
JP
Japan
Prior art keywords
workpiece
spinner
recess
coating
fitted
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14273087U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0450947Y2 (cg-RX-API-DMAC7.html
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14273087U priority Critical patent/JPH0450947Y2/ja
Publication of JPS6448170U publication Critical patent/JPS6448170U/ja
Application granted granted Critical
Publication of JPH0450947Y2 publication Critical patent/JPH0450947Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Coating Apparatus (AREA)
JP14273087U 1987-09-18 1987-09-18 Expired JPH0450947Y2 (cg-RX-API-DMAC7.html)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14273087U JPH0450947Y2 (cg-RX-API-DMAC7.html) 1987-09-18 1987-09-18

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14273087U JPH0450947Y2 (cg-RX-API-DMAC7.html) 1987-09-18 1987-09-18

Publications (2)

Publication Number Publication Date
JPS6448170U true JPS6448170U (cg-RX-API-DMAC7.html) 1989-03-24
JPH0450947Y2 JPH0450947Y2 (cg-RX-API-DMAC7.html) 1992-12-01

Family

ID=31408928

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14273087U Expired JPH0450947Y2 (cg-RX-API-DMAC7.html) 1987-09-18 1987-09-18

Country Status (1)

Country Link
JP (1) JPH0450947Y2 (cg-RX-API-DMAC7.html)

Also Published As

Publication number Publication date
JPH0450947Y2 (cg-RX-API-DMAC7.html) 1992-12-01

Similar Documents

Publication Publication Date Title
JPS6262868U (cg-RX-API-DMAC7.html)
JPS6448171U (cg-RX-API-DMAC7.html)
JPS6448170U (cg-RX-API-DMAC7.html)
JPS62187680U (cg-RX-API-DMAC7.html)
JPS6153930U (cg-RX-API-DMAC7.html)
JPH0379872U (cg-RX-API-DMAC7.html)
JPS6262870U (cg-RX-API-DMAC7.html)
JPH0215864U (cg-RX-API-DMAC7.html)
JPS62164347U (cg-RX-API-DMAC7.html)
JPS61130375U (cg-RX-API-DMAC7.html)
JPH02102726U (cg-RX-API-DMAC7.html)
JPS6452502U (cg-RX-API-DMAC7.html)
JPH0285348U (cg-RX-API-DMAC7.html)
JPH01129058U (cg-RX-API-DMAC7.html)
JPS62103247U (cg-RX-API-DMAC7.html)
JPS61198266U (cg-RX-API-DMAC7.html)
JPS61204677U (cg-RX-API-DMAC7.html)
JPS6366554U (cg-RX-API-DMAC7.html)
JPS58183281U (ja) スプレプロセス装置
JPS6369538U (cg-RX-API-DMAC7.html)
JPH0173372U (cg-RX-API-DMAC7.html)
JPH0170326U (cg-RX-API-DMAC7.html)
JPS6094660U (ja) レジスト塗布装置
JPS639129U (cg-RX-API-DMAC7.html)
JPH02146431U (cg-RX-API-DMAC7.html)