JPS6448031U - - Google Patents

Info

Publication number
JPS6448031U
JPS6448031U JP14311587U JP14311587U JPS6448031U JP S6448031 U JPS6448031 U JP S6448031U JP 14311587 U JP14311587 U JP 14311587U JP 14311587 U JP14311587 U JP 14311587U JP S6448031 U JPS6448031 U JP S6448031U
Authority
JP
Japan
Prior art keywords
boat
support member
switch
elevating
holding
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP14311587U
Other languages
English (en)
Japanese (ja)
Other versions
JPH0632683Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987143115U priority Critical patent/JPH0632683Y2/ja
Publication of JPS6448031U publication Critical patent/JPS6448031U/ja
Application granted granted Critical
Publication of JPH0632683Y2 publication Critical patent/JPH0632683Y2/ja
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

Links

Landscapes

  • Control Of Conveyors (AREA)
JP1987143115U 1987-09-21 1987-09-21 半導体ウエハ保持ボート位置監視装置 Expired - Lifetime JPH0632683Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987143115U JPH0632683Y2 (ja) 1987-09-21 1987-09-21 半導体ウエハ保持ボート位置監視装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987143115U JPH0632683Y2 (ja) 1987-09-21 1987-09-21 半導体ウエハ保持ボート位置監視装置

Publications (2)

Publication Number Publication Date
JPS6448031U true JPS6448031U (US20030204162A1-20031030-M00001.png) 1989-03-24
JPH0632683Y2 JPH0632683Y2 (ja) 1994-08-24

Family

ID=31409648

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987143115U Expired - Lifetime JPH0632683Y2 (ja) 1987-09-21 1987-09-21 半導体ウエハ保持ボート位置監視装置

Country Status (1)

Country Link
JP (1) JPH0632683Y2 (US20030204162A1-20031030-M00001.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56173524U (US20030204162A1-20031030-M00001.png) * 1980-05-23 1981-12-22
JPS6168444U (US20030204162A1-20031030-M00001.png) * 1984-10-12 1986-05-10

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS56173524U (US20030204162A1-20031030-M00001.png) * 1980-05-23 1981-12-22
JPS6168444U (US20030204162A1-20031030-M00001.png) * 1984-10-12 1986-05-10

Also Published As

Publication number Publication date
JPH0632683Y2 (ja) 1994-08-24

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