JPS6448024U - - Google Patents
Info
- Publication number
- JPS6448024U JPS6448024U JP14306887U JP14306887U JPS6448024U JP S6448024 U JPS6448024 U JP S6448024U JP 14306887 U JP14306887 U JP 14306887U JP 14306887 U JP14306887 U JP 14306887U JP S6448024 U JPS6448024 U JP S6448024U
- Authority
- JP
- Japan
- Prior art keywords
- buffer
- steam cleaning
- cleaning dryer
- divided
- utility
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000013020 steam cleaning Methods 0.000 claims description 4
- 238000001816 cooling Methods 0.000 claims description 2
Landscapes
- Cleaning By Liquid Or Steam (AREA)
- Drying Of Solid Materials (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14306887U JPS6448024U (fi) | 1987-09-21 | 1987-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14306887U JPS6448024U (fi) | 1987-09-21 | 1987-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448024U true JPS6448024U (fi) | 1989-03-24 |
Family
ID=31409558
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14306887U Pending JPS6448024U (fi) | 1987-09-21 | 1987-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448024U (fi) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7538849B2 (en) | 1995-02-15 | 2009-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Active matrix display and forming method thereof |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62150827A (ja) * | 1985-12-25 | 1987-07-04 | Hitachi Tokyo Electron Co Ltd | 表面処理装置 |
-
1987
- 1987-09-21 JP JP14306887U patent/JPS6448024U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS62150827A (ja) * | 1985-12-25 | 1987-07-04 | Hitachi Tokyo Electron Co Ltd | 表面処理装置 |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US7538849B2 (en) | 1995-02-15 | 2009-05-26 | Semiconductor Energy Laboratory Co., Ltd. | Active matrix display and forming method thereof |