JPS6448020U - - Google Patents
Info
- Publication number
- JPS6448020U JPS6448020U JP14311087U JP14311087U JPS6448020U JP S6448020 U JPS6448020 U JP S6448020U JP 14311087 U JP14311087 U JP 14311087U JP 14311087 U JP14311087 U JP 14311087U JP S6448020 U JPS6448020 U JP S6448020U
- Authority
- JP
- Japan
- Prior art keywords
- notch
- wafer
- chamfering
- utility
- scope
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 claims 1
Landscapes
- Mechanical Treatment Of Semiconductor (AREA)
Description
第１図はウエハのＶエツジ部分の正面図、第２
図は第１図の―の断面図、第３図は本考案の
拡大平面図、第４図は第３図の―の断面図。
１……ウエハ、２……Ｖノツチ、３……外周面
取り線、６……Ｖノツチ部分の面取り線。
Figure 1 is a front view of the V-edge part of the wafer, Figure 2 is a front view of the V edge portion of the wafer.
The figures are a sectional view taken at - in Fig. 1, Fig. 3 is an enlarged plan view of the present invention, and Fig. 4 is a sectional view taken at - in Fig. 3. 1... Wafer, 2... V-notch, 3... Outer circumferential chamfering line, 6... Chamfering line of V-notch portion.
Claims (1)
構成する稜線の上下のエツジを面取りしてなる半
導体ウエハ。 A semiconductor wafer made by chamfering the upper and lower edges of the ridgeline forming the notch on a wafer with a V-notch.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14311087U JPS6448020U (en) | 1987-09-21 | 1987-09-21 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14311087U JPS6448020U (en) | 1987-09-21 | 1987-09-21 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6448020U true JPS6448020U (en) | 1989-03-24 |
Family
ID=31409638
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14311087U Pending JPS6448020U (en) | 1987-09-21 | 1987-09-21 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6448020U (en) |
-
1987
- 1987-09-21 JP JP14311087U patent/JPS6448020U/ja active Pending