JPS6447600U - - Google Patents
Info
- Publication number
- JPS6447600U JPS6447600U JP14136487U JP14136487U JPS6447600U JP S6447600 U JPS6447600 U JP S6447600U JP 14136487 U JP14136487 U JP 14136487U JP 14136487 U JP14136487 U JP 14136487U JP S6447600 U JPS6447600 U JP S6447600U
- Authority
- JP
- Japan
- Prior art keywords
- motor
- vacuum pump
- drive voltage
- vacuum
- power supply
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000010586 diagram Methods 0.000 description 3
- 230000006698 induction Effects 0.000 description 1
Landscapes
- Non-Positive Displacement Air Blowers (AREA)
- Control Of Ac Motors In General (AREA)
Description
第１〜４図は本考案による真空ポンプ用モータ
の駆動電圧切換装置の第１実施例を示す図であり
、第１図は真空ポンプの断面図、第２図は要部の
ブロツク図、第３図、第４図は作用を説明する電
圧・時間特性図、第５図は本考案による真空ポン
プ用モータの駆動電圧切換装置の第２実施例を示
すブロツク図である。
１……真空ポンプ、２……ハウジング、３……
ステータ翼、５……ロータ、６……ロータ翼、８
……ステータコラム、１０……三相誘導モータ、
１２……交流電源装置、１４，２４……駆動電圧
切換装置（切換手段）、１６……切換スイツチ、
１８……回転数検出器、２０……変換器。
1 to 4 are diagrams showing a first embodiment of the driving voltage switching device for a vacuum pump motor according to the present invention, in which FIG. 1 is a sectional view of the vacuum pump, FIG. 3 and 4 are voltage-time characteristic diagrams for explaining the operation, and FIG. 5 is a block diagram showing a second embodiment of the drive voltage switching device for a vacuum pump motor according to the present invention. 1...Vacuum pump, 2...Housing, 3...
Stator blade, 5... Rotor, 6... Rotor blade, 8
... Stator column, 10 ... Three-phase induction motor,
12... AC power supply device, 14, 24... Drive voltage switching device (switching means), 16... Changeover switch,
18... Rotation speed detector, 20... Converter.
Claims (1)
駆動電圧を供給する電源装置とを備え、前記回転
部材をモータにより回転駆動することにより真空
室の真空度を向上させる真空ポンプにおいて、前
記電源装置が供給する駆動電圧を複数段階に切り
換え可能にする切換手段を設けたことを特徴とす
る真空ポンプ用モータの駆動電圧切換装置。A vacuum pump that includes a motor that rotationally drives a rotating member and a power supply device that supplies a driving voltage to the motor, and improves the degree of vacuum in a vacuum chamber by driving the rotating member to rotate with the motor, the power supply device comprising: 1. A drive voltage switching device for a vacuum pump motor, characterized in that the drive voltage switching device for a vacuum pump motor is provided with a switching means that can switch the supplied drive voltage into a plurality of stages.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14136487U JPS6447600U (en) | 1987-09-16 | 1987-09-16 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14136487U JPS6447600U (en) | 1987-09-16 | 1987-09-16 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447600U true JPS6447600U (en) | 1989-03-23 |
Family
ID=31406355
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14136487U Pending JPS6447600U (en) | 1987-09-16 | 1987-09-16 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447600U (en) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09310696A (en) * | 1996-03-21 | 1997-12-02 | Osaka Shinku Kiki Seisakusho:Kk | Molecular drag pump |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52125801A (en) * | 1976-04-14 | 1977-10-22 | Mitsubishi Electric Corp | Pressure controller of pump |
-
1987
- 1987-09-16 JP JP14136487U patent/JPS6447600U/ja active Pending
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS52125801A (en) * | 1976-04-14 | 1977-10-22 | Mitsubishi Electric Corp | Pressure controller of pump |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH09310696A (en) * | 1996-03-21 | 1997-12-02 | Osaka Shinku Kiki Seisakusho:Kk | Molecular drag pump |
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