JPS6447036U - - Google Patents

Info

Publication number
JPS6447036U
JPS6447036U JP14069787U JP14069787U JPS6447036U JP S6447036 U JPS6447036 U JP S6447036U JP 14069787 U JP14069787 U JP 14069787U JP 14069787 U JP14069787 U JP 14069787U JP S6447036 U JPS6447036 U JP S6447036U
Authority
JP
Japan
Prior art keywords
exhaust chamber
process tube
gas
reaction
gas inlet
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14069787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14069787U priority Critical patent/JPS6447036U/ja
Publication of JPS6447036U publication Critical patent/JPS6447036U/ja
Pending legal-status Critical Current

Links

JP14069787U 1987-09-14 1987-09-14 Pending JPS6447036U (US20020051482A1-20020502-M00012.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14069787U JPS6447036U (US20020051482A1-20020502-M00012.png) 1987-09-14 1987-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14069787U JPS6447036U (US20020051482A1-20020502-M00012.png) 1987-09-14 1987-09-14

Publications (1)

Publication Number Publication Date
JPS6447036U true JPS6447036U (US20020051482A1-20020502-M00012.png) 1989-03-23

Family

ID=31405105

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14069787U Pending JPS6447036U (US20020051482A1-20020502-M00012.png) 1987-09-14 1987-09-14

Country Status (1)

Country Link
JP (1) JPS6447036U (US20020051482A1-20020502-M00012.png)

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