JPS6447035U - - Google Patents

Info

Publication number
JPS6447035U
JPS6447035U JP14120687U JP14120687U JPS6447035U JP S6447035 U JPS6447035 U JP S6447035U JP 14120687 U JP14120687 U JP 14120687U JP 14120687 U JP14120687 U JP 14120687U JP S6447035 U JPS6447035 U JP S6447035U
Authority
JP
Japan
Prior art keywords
wafer
suction table
dielectric
suction
separated
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14120687U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14120687U priority Critical patent/JPS6447035U/ja
Publication of JPS6447035U publication Critical patent/JPS6447035U/ja
Pending legal-status Critical Current

Links

JP14120687U 1987-09-16 1987-09-16 Pending JPS6447035U (US06521211-20030218-C00004.png)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14120687U JPS6447035U (US06521211-20030218-C00004.png) 1987-09-16 1987-09-16

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14120687U JPS6447035U (US06521211-20030218-C00004.png) 1987-09-16 1987-09-16

Publications (1)

Publication Number Publication Date
JPS6447035U true JPS6447035U (US06521211-20030218-C00004.png) 1989-03-23

Family

ID=31406072

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14120687U Pending JPS6447035U (US06521211-20030218-C00004.png) 1987-09-16 1987-09-16

Country Status (1)

Country Link
JP (1) JPS6447035U (US06521211-20030218-C00004.png)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5633835A (en) * 1979-08-29 1981-04-04 Hitachi Ltd Holding mechanism for plate shaped substance
JPS6013047B2 (ja) * 1977-07-05 1985-04-04 株式会社日立製作所 溶接継手の熱処理方法

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6013047B2 (ja) * 1977-07-05 1985-04-04 株式会社日立製作所 溶接継手の熱処理方法
JPS5633835A (en) * 1979-08-29 1981-04-04 Hitachi Ltd Holding mechanism for plate shaped substance

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