JPS6447030U - - Google Patents
Info
- Publication number
- JPS6447030U JPS6447030U JP14077587U JP14077587U JPS6447030U JP S6447030 U JPS6447030 U JP S6447030U JP 14077587 U JP14077587 U JP 14077587U JP 14077587 U JP14077587 U JP 14077587U JP S6447030 U JPS6447030 U JP S6447030U
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- furnace body
- axis
- segments
- opened
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 230000004308 accommodation Effects 0.000 claims 1
- 239000007791 liquid phase Substances 0.000 claims 1
Landscapes
- Crystals, And After-Treatments Of Crystals (AREA)
- Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14077587U JPS6447030U (enExample) | 1987-09-14 | 1987-09-14 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14077587U JPS6447030U (enExample) | 1987-09-14 | 1987-09-14 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6447030U true JPS6447030U (enExample) | 1989-03-23 |
Family
ID=31405256
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14077587U Pending JPS6447030U (enExample) | 1987-09-14 | 1987-09-14 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6447030U (enExample) |
Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5438851U (enExample) * | 1977-08-22 | 1979-03-14 | ||
| JPS62134926A (ja) * | 1985-12-06 | 1987-06-18 | Teru Saamuko Kk | 加熱装置 |
-
1987
- 1987-09-14 JP JP14077587U patent/JPS6447030U/ja active Pending
Patent Citations (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5438851U (enExample) * | 1977-08-22 | 1979-03-14 | ||
| JPS62134926A (ja) * | 1985-12-06 | 1987-06-18 | Teru Saamuko Kk | 加熱装置 |