JPS6447030U - - Google Patents

Info

Publication number
JPS6447030U
JPS6447030U JP14077587U JP14077587U JPS6447030U JP S6447030 U JPS6447030 U JP S6447030U JP 14077587 U JP14077587 U JP 14077587U JP 14077587 U JP14077587 U JP 14077587U JP S6447030 U JPS6447030 U JP S6447030U
Authority
JP
Japan
Prior art keywords
reaction tube
furnace body
axis
segments
opened
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14077587U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14077587U priority Critical patent/JPS6447030U/ja
Publication of JPS6447030U publication Critical patent/JPS6447030U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Crystals, And After-Treatments Of Crystals (AREA)
  • Liquid Deposition Of Substances Of Which Semiconductor Devices Are Composed (AREA)
JP14077587U 1987-09-14 1987-09-14 Pending JPS6447030U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14077587U JPS6447030U (enrdf_load_stackoverflow) 1987-09-14 1987-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14077587U JPS6447030U (enrdf_load_stackoverflow) 1987-09-14 1987-09-14

Publications (1)

Publication Number Publication Date
JPS6447030U true JPS6447030U (enrdf_load_stackoverflow) 1989-03-23

Family

ID=31405256

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14077587U Pending JPS6447030U (enrdf_load_stackoverflow) 1987-09-14 1987-09-14

Country Status (1)

Country Link
JP (1) JPS6447030U (enrdf_load_stackoverflow)

Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438851U (enrdf_load_stackoverflow) * 1977-08-22 1979-03-14
JPS62134926A (ja) * 1985-12-06 1987-06-18 Teru Saamuko Kk 加熱装置

Patent Citations (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5438851U (enrdf_load_stackoverflow) * 1977-08-22 1979-03-14
JPS62134926A (ja) * 1985-12-06 1987-06-18 Teru Saamuko Kk 加熱装置

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