JPS6447028U - - Google Patents
Info
- Publication number
- JPS6447028U JPS6447028U JP14069887U JP14069887U JPS6447028U JP S6447028 U JPS6447028 U JP S6447028U JP 14069887 U JP14069887 U JP 14069887U JP 14069887 U JP14069887 U JP 14069887U JP S6447028 U JPS6447028 U JP S6447028U
- Authority
- JP
- Japan
- Prior art keywords
- board
- boat body
- boat
- plasma cvd
- cvd apparatus
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000002184 metal Substances 0.000 claims description 7
- 238000005268 plasma chemical vapour deposition Methods 0.000 claims 2
- 239000004020 conductor Substances 0.000 claims 1
- 239000000758 substrate Substances 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 1
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14069887U JPS6447028U (is) | 1987-09-14 | 1987-09-14 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP14069887U JPS6447028U (is) | 1987-09-14 | 1987-09-14 |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS6447028U true JPS6447028U (is) | 1989-03-23 |
Family
ID=31405107
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP14069887U Pending JPS6447028U (is) | 1987-09-14 | 1987-09-14 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6447028U (is) |
-
1987
- 1987-09-14 JP JP14069887U patent/JPS6447028U/ja active Pending