JPS6446784U - - Google Patents
Info
- Publication number
- JPS6446784U JPS6446784U JP14201187U JP14201187U JPS6446784U JP S6446784 U JPS6446784 U JP S6446784U JP 14201187 U JP14201187 U JP 14201187U JP 14201187 U JP14201187 U JP 14201187U JP S6446784 U JPS6446784 U JP S6446784U
- Authority
- JP
- Japan
- Prior art keywords
- substrate
- photodetector
- scanning
- layers
- detect
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000000758 substrate Substances 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 1
- 230000003287 optical effect Effects 0.000 claims 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14201187U JPS6446784U (de) | 1987-09-17 | 1987-09-17 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP14201187U JPS6446784U (de) | 1987-09-17 | 1987-09-17 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPS6446784U true JPS6446784U (de) | 1989-03-22 |
Family
ID=31407584
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP14201187U Pending JPS6446784U (de) | 1987-09-17 | 1987-09-17 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6446784U (de) |
-
1987
- 1987-09-17 JP JP14201187U patent/JPS6446784U/ja active Pending
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