JPS6445633U - - Google Patents

Info

Publication number
JPS6445633U
JPS6445633U JP14025787U JP14025787U JPS6445633U JP S6445633 U JPS6445633 U JP S6445633U JP 14025787 U JP14025787 U JP 14025787U JP 14025787 U JP14025787 U JP 14025787U JP S6445633 U JPS6445633 U JP S6445633U
Authority
JP
Japan
Prior art keywords
substrate
conveyance
pair
substrate transfer
dust removal
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP14025787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP14025787U priority Critical patent/JPS6445633U/ja
Publication of JPS6445633U publication Critical patent/JPS6445633U/ja
Pending legal-status Critical Current

Links

Landscapes

  • Delivering By Means Of Belts And Rollers (AREA)
  • Feeding Of Articles By Means Other Than Belts Or Rollers (AREA)
JP14025787U 1987-09-14 1987-09-14 Pending JPS6445633U (en18)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP14025787U JPS6445633U (en18) 1987-09-14 1987-09-14

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP14025787U JPS6445633U (en18) 1987-09-14 1987-09-14

Publications (1)

Publication Number Publication Date
JPS6445633U true JPS6445633U (en18) 1989-03-20

Family

ID=31404261

Family Applications (1)

Application Number Title Priority Date Filing Date
JP14025787U Pending JPS6445633U (en18) 1987-09-14 1987-09-14

Country Status (1)

Country Link
JP (1) JPS6445633U (en18)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009102085A (ja) * 2007-10-19 2009-05-14 Seiko Epson Corp 記録装置

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2009102085A (ja) * 2007-10-19 2009-05-14 Seiko Epson Corp 記録装置

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