JPS6445324U - - Google Patents

Info

Publication number
JPS6445324U
JPS6445324U JP13862787U JP13862787U JPS6445324U JP S6445324 U JPS6445324 U JP S6445324U JP 13862787 U JP13862787 U JP 13862787U JP 13862787 U JP13862787 U JP 13862787U JP S6445324 U JPS6445324 U JP S6445324U
Authority
JP
Japan
Prior art keywords
detection signal
substrate body
protrusion
generation pattern
frequency
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Pending
Application number
JP13862787U
Other languages
English (en)
Japanese (ja)
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP13862787U priority Critical patent/JPS6445324U/ja
Publication of JPS6445324U publication Critical patent/JPS6445324U/ja
Pending legal-status Critical Current

Links

JP13862787U 1987-09-10 1987-09-10 Pending JPS6445324U (enrdf_load_stackoverflow)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP13862787U JPS6445324U (enrdf_load_stackoverflow) 1987-09-10 1987-09-10

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP13862787U JPS6445324U (enrdf_load_stackoverflow) 1987-09-10 1987-09-10

Publications (1)

Publication Number Publication Date
JPS6445324U true JPS6445324U (enrdf_load_stackoverflow) 1989-03-20

Family

ID=31401134

Family Applications (1)

Application Number Title Priority Date Filing Date
JP13862787U Pending JPS6445324U (enrdf_load_stackoverflow) 1987-09-10 1987-09-10

Country Status (1)

Country Link
JP (1) JPS6445324U (enrdf_load_stackoverflow)

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